捲對捲覆晶薄膜製程之CCD檢測與機構設計

捲帶式薄模覆晶(Chip on Film)，這種產品材料比銅箔材料更容易有荷葉邊及更薄，加上正面無法碰觸，所以一般段差機構使用的調整式儀器皆無法使用，緣此，本研究是設計一種特殊的機構以滿足功能需求。針對捲對捲製程中Chip on Film一樣會產生張力不均或變形與皺摺的缺點，故設計帶動滾輪使左右兩邊設計落差，使得在成形區不直接碰觸。然而，經初步測試結果可知，若單純使用段差機構及配重來調整所需張力，是無法達到滿足系統調整張力精確度的需求。因此本技術報告主要目的是設計一款不需要使用張力控制器，而使用滾輪與配重來解決捲對捲製程中張力及偏擺問題的機構，來克服在設備中安裝張力控制器與糾邊系統解決張力調整與偏擺異常的情況。由實際測試中發現是機構基座的線性滑軌元件，動作在上下線性活動時可行但卻無法左右小幅度偏擺，造成料卷轉動時異常，經不斷嘗試設計各種部品包括線性滑軌、單邊WCS配軸承座、雙邊WCS配軸承座等，經測試皆無法達到功能需求。當使用品牌MISUMI中的｢滾輪滑軌｣的料件，它是由附帶小型軸承的滾輪運行於U型軌道上，使其具有在上下線性移動時會有小幅度偏擺的效果，可滿足所需之運動軌跡。整體系統主要包括滾輪滑軌、配重塊、鋼索、固定基座、扣爪、定位SENSOR等，並安裝此機構各一組在機台的左右邊同時使用。經實際測試3卷料帶規格皆為70mm寬，共計執行327m，滾輪滑軌動作區間為上下200mm，上下一次為一循環統計共移動2736次，期間除兩次人員操作失誤外，其餘皆正常運作，可靠度佳也確實可以達到預期之功能需求。關鍵詞: 捲帶式薄模覆晶(Chip on Film) 、捲對捲製程、張力控制。

關鍵字

捲帶式薄模覆晶；捲對捲製程；張力控制

並列摘要

Chip on Film, this product material is more likely to have a ruffled edge which is thinner than a copper foil material. A usually seen adjustment instrument for step difference mechanism is not useful because the front surface is not touchable. Hence, design of a special mechanism is the focus in this article. The defects due to uneven tension or deformation and wrinkles will happen in the reel-to-reel process of Chip on Film. It is found that using the step difference mechanism and counterweight cannot appropriately adjust the tension in the first trials. Therefore, instead of using a regular tension controller by means of tension sensors, the main purpose of this technical report is to design a tension-control mechanism by simply using rollers and counterweights to overcome the tension as well as yaw change problem in the reel-to-reel process. Because of this arrangement, tension sensor and controller as well as the edge correction system are no need and the tension-control mechanism is able to solve the problem. From the practical testing, it was found that the linear slide component of the mechanism base is workable to support the up and down linear motion, but cannot provide the left and right tilt motion so as to cause abnormal rotation of the coil. To overcome this problem, many trials by use of rails, single-sided WCS with bearing housings, bilateral WCS with bearing housings, etc. have been carried out. However, these mechanisms cannot meet the functional requirements. Only the investigation of using the "roller rail" material made by MISUMI, which is constructed by the roller with small bearings in the U-shaped on the track producing a small yaw effect when moving up and down linearly, can provide the desired motion trajectory. The entire system mainly includes roller slide rails, counterweights, steel cables, fixed bases, claws, positioning sensor, etc., which is installed in the left and right side of reel-to-reel machine respectively and run simultaneously. Three tapes of 70mm wide are chosen to run 327m long. The operating range of the roller slide is 200mm. The running cycle which means running up and down once, is 2736 in testing. As a result, only happened operational errors two times. It implies the developed reel-to-reel machine can achieve the purpose with good reliability. Key words: Chip on Film, reel-to-reel process, tension control