機械式微溝槽切削

The Investigation of Micro-slit on Brass Using the Mechanical Removal

黃豪偉(Haur-wei Huang)

國立虎尾科技大學/工程學院/機械與機電工程研究所/碩士(2007年)

摘要

近年來，由於產品趨向微小化，因此微細加工技術的開發是各相關產業積極投入的重點項目之ㄧ。本論文探討以微細刀刃對銅箔機械式微切削的機制觀察與分析，最終以切削微流道溝槽，實現微結構物的成型。
本論文研究分為製作微細刀刃與探討機械式精微切削兩部份。首先，微細刀刃的製作採用微電解與微放電加工兩種製程製作，成功的製作不同針尖角度的微針尖刀具及具有不同角度的正、負切削角與後斜角所搭配的單刀刃微刀具與具有4個正切削角的4刀刃微刀具等三種形式的微細刀刃。
另外，為達成精微切削加工目標，以壓電平台所組成的精微切削加工系統，在本研究中被提出；將微細刀刃固定在壓電平台上，以最小移動量50nm的壓電平台配合LabVIEW位移程式編輯達到精微控制及精微切削的目的。
以微針尖刀具切削V型微流道溝槽以及運用單刀刃微刀具切削槽寬約為20μm的U型微流道溝槽，實驗過程中，以刀刃的外型、切削速率與表面粗糙度，探討切削時微細刀刃的剛性，並觀察材料流動與微流道溝槽的品質。其實驗結果為(1) 在精微切削過程中，微細刀刃受到少許的切削抵抗，容易產生變型與撓曲；(2) 微針尖刀具的圓錐面並無刀刃，所去除的材料會沿著圓錐面產生擠壓；負切削角以擠壓方式造成材料流動，而正切削角以切削方式造成材料流動；(3) 觀察實驗結果知切削速率快者，能減少微流道溝槽兩側之毛邊；(4) 精微切削加工的加工量極小，所以刀具表面粗糙度的高低差若大於精微切削的加工量，會產生微流道溝槽的不完整性。

並列摘要

For the past few years, due to the products have tended to miniaturization, the development of microfabrication technology is becoming an important role in industrial application. To make micro-slit of less than 6 μm width on the brass, a mechemical removal process which the micro-cutter made through μ-ECM and μ-EDM is mounted on the ultra-precision stage actuated from PZT has been proposed in the thesis.
Form results, various facts strongly affect the machining accuracy, such as deformation and roughness of the tool. According to the experimental, the conical surface on the micro-cutter is not subjected to the removal, action replaced of extrusion. As the rake angle is positive on the micro-cutter, the resistance raising from cutting action is lower than the negative. A quick feed is able to reduce the micro flow channel trench burr.

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