氫氟酸洩漏後果分析-以大園區為案例

氫氟酸(Hydrogen Fluoride, HF)於現今工業當中被大量應用，尤其在半導體業界更是被大量使用在蝕刻製程中，在資訊揭露的時代，使用者對接觸氫氟酸危害性也相當清楚，但對於氫氟酸氣體的危害及影響卻少有探討。本研究利用ALOHA (Areal Locations of Hazardous Atmospheres)軟體及QGIS (Quantum Geographic Information System，QGIS) 軟體模擬氫氟酸(Hydrogen Fluoride, HF)20噸桶槽底閥洩漏及6噸ISO Tank槽車入料時發生洩漏的後果分析，地點挑選大園區為主，結果顯示 (1) 氫氟酸洩漏後影響的範圍及面積，例如最嚴重(ERPG-3)區域為田心里及內海里，影響面積從7037~62859平方公尺。 (2) 得到各區域接觸後可能面臨的健康危害。 (3) 結合QGIS後，量化周圍基本資料，例如提供上風處可供避難處所的資訊與地圖資料、醫院、消防隊、人口資源等。可供緊急應變或鄉鎮地區制定防災計畫使用。藉由此模擬結果的嚴重性，探討氫氟酸洩漏的後果分析並提供更完善防災計畫和措施，最後此研究實際提供公司可量化的風險資料，並藉由實際改善而降低或控制風險。希望藉由本研究，可以提供其他事業單位作為參考範例，依循本研究加強風險評估和改善或加強設施本質安全。

關鍵字

氫氟酸； ALOHA ；擴散模擬；地理資訊系統； GIS ； QGIS

並列摘要

HF (Hydrogen Fluoride) is massively used in many industries nowadays, especially throughout etching processes in the semiconductor field. As compared to the well-known risk of HF chemical solutions, the danger of HF gas is seldom discussed. This research utilizes ALOHA (Areal Locations of Hazardous Atmospheres) software and integrate QGIS (Quantum Geographic Information System) software program to simulate and analyze the consequences under two hazardous scenarios: (a) leakage of HF through the bottom valve of a 20-tons HF tank, and (b) leakage of HF while inserting HF solutions to a 6-tons chemical truck with ISO Tank Container. Dayuan, Taoyuan is selected as the simulated place of occurrence. The results show: (1) The range and area of influence after hydrofluoric acid leakage, for example, the most severe (ERPG-3) area is Tianxin and Neihai Neighborhoods , and the affected area ranges from 7037 to 62859 square meters. (2) Health hazards that may be encountered after contact with various regions. (3) Combining QGIS, we will quantify the surrounding basic information, such as information and map materials for shelters, hospitals, fire brigades, and population resources. It can be used for emergency response or township areas to develop disaster prevention plans. Hopefully by the severity through the simulated HF gas leakage crisis, more attention could be drawn to the hazardous HF gas, and comprehensive Prevention and Response Operation Plans could be developed and fully practiced among related industries. Finally, this study actually provides the company with quantifiable risk data and reduces or controls the risk through improvement. Furthermore, the data collected could be provided to other enterprises as a reference, following our analysis method and apply it to their company for analysis on risk. Key words: HF, ALOHA, Dispersion modeling, geographical information system(GIS), QGIS