- 學位論文
PZT 和 PMN-PT 壓電陶瓷材料製作與特性測試
The production and characteristic test of piezoelectric ceramic material PZT and PMN-PT
摘要
本研究目的為利用溶膠-凝膠法(sol-gel)及固態反應法(solid state method)製作鋯鈦酸鉛(Pb(Zr(1-x)Tix)O3，簡稱PZT)及弛緩體(relaxor)鐵電(ferroelectric)材料(1-x)Pb(Mg(1/3)Nb(2/3))O3-xPbTiO3(簡稱PMN-PT) 其中x為PbTiO3的莫爾分數。以溶膠-凝膠法製作出初始粉體，將粉體製成圓片狀結構，接著再以固態反應法高溫燒結，減少了需使用金屬當作基材的製程步驟。藉由市售PZT粉末建立完整的製作流程，製作出具有壓電性的PMN-PT，透過阻抗分析儀、雷射位移計、超聲波發射接收測試、回波測試，測量元件特性。 從回波測試結果圖得知自製PMN-PT元件的回波波形較市售粉末PZT元件的回波波形清楚且明顯。在超聲波發射與接收測試裡，雖然元件的主共振頻不同，但從結果數據可以明顯得知自製PMN-PT元件發射及接收的強度較優於市售粉末PZT元件。而雷射位移器量測結果，自製PMN-PT元件836Hz的1.85μm位移量遠大於市售PZT元件600Hz的0.3465μm。
並列摘要
This study mainly reported the production of lead zirconate titanate(PZT) and relaxor ferroelectric materials (PMN-PT) by sol - gel method and solid state reaction method. We fabricated initial powder by sol-gel method and then to make the powder into the round structure. After that, the processed materials were sintered in high temperature by solid state reaction method. This procedure reduces the requirement of use metal as a substrate. In the first place, we established a fabrication process by utilizing the commercial PZT powder and then use the developed process to produce piezoelectric materials PMN-PT. We measured characteristic of the fabricated piezoelectric elements through the impedance analyzer, laser displacement meter, transmitting and receiving test of ultrasound wave and pulse-echo test. The result of pulse-echo experiment shows that the PMN-PT transducer performs better than the PZT transducer. Although the primary resonant frequency of the PZT is different from the PMN-PT, the signal intensity of PMN-PT from data is better than that of the PZT. As for the laser displacement measurement, the PMN-PT device possesses a 1.85μm displacement operated in 836Hz, which is larger than the displacement of 0.3465μm produced by the PZT device operated in 600Hz when both cases actuated with 10V sinusoidal wave.