- 學位論文
廢水處理廠逸散異味之研究-以南部某晶圓廠為例
Characteristics of Odors emitted from Wastewater Treatment Plant - a Study Case in Southern Taiwan Wafer Fabrication Process
摘要
半導體製造產業對我國經濟發展具有高度貢獻，但是在晶圓製造過程中所使用的有機溶劑、酸鹼化學品，其產生的廢水、廢氣、廢棄物均具有高污染性，其中又以水污染問題普遍受到國人重視，因此企業設置廢水處理廠，以確保廢水能經過妥善處理，但廢水在處理過程中所散發的異味將可能衍生成另一個公害問題。 本研究以南部某晶圓代工業的廢水處理廠為研究對象，使用異味污染物官能測定法-三點比較式嗅袋法(NIEA A201.14A)分別對廢水處理廠內進行異味採樣及濃度分析，執行採樣作業時搭配手持式儀器測量環境溫濕度及水質檢測、設備運作狀況等記錄，並於廢水處理廠平面配置圖上繪製異味濃度等濃度圖，將異味濃度與各項紀錄參數進行皮爾森相關係數分析加以探討異味特徵及濃度分佈之關聯性。 本研究於廢水處理廠進行七個月的異味採樣與分析，由實驗結果得知異味濃度最高的廢水處理單元為有機廢水集中池，其平均異味濃度(599.73)，因此處理單元用於收集低濃度有機廢水，廢水中所含易揮發有機物質經攪拌機快速攪拌使異味大量逸散至空氣中，再將水質檢測數據與異味濃度進行相關係數分析顯示COD與異味濃度呈現高度正相關，表示廢水中COD濃度高低影響異味的逸散濃度。異味採樣分析的過程中也發現擾動廢水的動力設備型式、攪拌設備的轉速與廢水廠送風機開啟數量均會對異味濃度及異味分佈帶來明顯影響。
並列摘要
The semiconductor manufacturing industry contributes considerably to economic development in Taiwan. However, the organic solvents, acidic or alkalic chemicals, and the resulting wastewater, waste gas, and solid waste are highly pollutant. In particular, water pollution is a problem that generally receives attention in Taiwan. Therefore, enterprises shall establish wastewater treatment plants to ensure wastewater can be properly treated. However, wastewater treatment processes may emit foul odors that may result in another public pollution problem. This study used a wastewater treatment plant of a wafer fabrication plant in southern Taiwan as the research target. A foul odor and pollutant functional determination method-triangular odor bag method (NIEA A201. 14A) was used to sample odor from a wastewater treatment plant to facilitate conducting a concentration analysis. During sampling, handheld devices shall be used to measure environmental temperature and humidity and record water quality data and equipment operational conditions. In addition, foul odor concentration distribution shall be plotted on the floor plan of the wastewater treatment plant. The odor concentration and various recorded parameters were analyzed using Pearson product-moment correlation analysis to explore the relationship between foul odor characteristics and concentration distribution. This study conducted 7 months of foul odor sampling in a wastewater treatment plant and facilitated relevant analyses. The experiment results revealed that the wastewater treatment units with the highest concentration of foul odor was the organic wastewater basin, where the mean odor concentration was 599.73. Thus, the treatment unit was used to collect low-concentration organic wastewater. Through rapid mixing of the volatile organic compounds in wastewater by using a mixer, foul odors largely emit to the air. Results of correlation analysis of water quality testing data and foul odor concentration revealed that COD and foul odor concentration were highly positively correlated. The result implied that the COD concentration in wastewater affected emission concentration of foul odors. The analysis results of odor samples also indicated that powered equipment for mixing wastewater, the rotation speed of mixing equipment, and the number of turbo fans turned on in the wastewater treatment plant significantly affected the foul odor concentration and distribution.