- 學位論文
以傾斜性製程研製摻鋁氧化鋅薄膜應用於觸壓感測之研究
Study of Al-doped ZnO thin films grown by inclined process to apply on touch sensing
摘要
本論文主要以射頻磁控濺鍍機(RF magnetron sputtering)來沉積摻鋁氧化鋅(Al-doped ZnO, AZO) 奈米薄膜。研究中為了降低傾斜性製程所造成的缺陷，先研製不同厚度之薄膜進行觸壓特性感測，找出最佳靈敏度之薄膜厚度。接著再研究最佳間歇時間，主要於薄膜沉積階段置入暫停時間，可使沉積原子有足夠的時間進行自我修復、排列， 以使原子堆疊更加緻密，降低沉積過程中的缺陷。最後再藉由調整不同傾斜角度，藉由陰影效應減少柱狀結構間產生之間隙而獲得最佳傾斜角度。研究中同時藉由霍爾效應量測系統量測AZO薄膜電性，再由場發射掃描式電子顯微鏡(FESEM) 及原子力顯微鏡(AFM)進行AZO薄膜表面形貌觀察與粗糙度狀態觀察，最後以X光繞射儀(XRD)進行薄膜結晶特性、薄膜晶粒大小(Crystallite size)分析。研究中亦以自行設計之觸壓感測電路，來檢測薄膜於不同傾斜角度製程下之感測靈敏性，主要以keithley 2400電源量測設備進行即時的電阻值變化監測。研究結果發現厚度300nm之AZO薄膜，於間歇時間7.5min及傾斜角40°下之製程結構，應用於觸壓感測時具有最佳的靈敏度，其靈敏度從平均值1.116提升至2.403，研究結果驗證藉由製程優化AZO薄膜後，具備未來應用於觸壓感測之潛力。
並列摘要
This thesis mainly uses RF magnetron sputtering to deposit Al-doped ZnO (AZO) nanometer films. In the research, in order to reduce the defects caused by the inclined process, films with different thicknesses has been deposited first for touch sensing, then the optimum thickness of the film with the best sensitivity is found. Then the intermittent time process had been done,which can make the deposited atoms to be more atomic stack denser and reduce the defects during the deposition process. Finally, the different inclined angles had been done to reduce the gaps between the columnar structures due to the shadow effect. In this study, the Hall effect measurement system was used to measure the electrical properties of the AZO thin film, and then the surface morphology of the AZO thin films were observed by field emission scanning electron microscope (FESEM) and atomic force microscope (AFM). Finally, X-ray diffractometer (XRD) was used to analyze the crystallization characteristics of the film. The self-designed touch pressure sensing circuit was used to analyze the sensitivity of the thin films under different process, and mainly use the Keithley 2400 power measurement equipment to monitor the real-time resistance value change. The research results found that the 300nm thickness AZO thin film treated with 7.5minutes intermittent time and inclination angle of 40。has the best touch sensitivity,which has increased from the average value of 1.116 to 2.403.In this study,the optimiged AZO thin film had been proved to has the potential for future applications in touch sensing.