This research mainly combined the single slot diffraction theory with the Laser system to establish a measuring system of optical strain gage. In this system, a non-destructive testing method for measuring deformation was established. Because it is easy to set up, not only can avoid the material to occur local hardnees by traditional strain gage, but also don't need to use the expensive equipment and can immediately reach, so will provide another powerful tool to analyze strain. In additional, it is also suitable for high-temperature operating environment. For example it can monitor warping causes by hot stress during COB process.