矽壓阻式微感器於壓力計與血壓計之設計應用

Design and Applications of Pressure Meter and Blood Pressure Monitor by Using Silicon

鍾文耀(Wen-Yaw Chung) ； 曾郁潔(Yu-Chien Tseng) ； 周國揚(Kuo-Young Chou)

《中原學報》 32卷3期 (2004/09) Pp. 393-400

摘要

本文實現一個與CMOS製程相容之矽壓阻式微感測器訊號讀出電路與應用系統。本研究利用微感器搭配AT89C51微控制器及商用類比數位轉換器，完成廣用壓力計之研製；另外，整合矽壓阻式微感測器、血壓計零組件、個人電腦與圖控式程式語言(LabVIEW)進行血壓計量測訊號擷取，完成一可提供長期監測記錄之血壓計系統。廣用壓力計的量測範圍在-291mmHg~100mmHg，精確度為5mmHg。血壓計系統收縮壓平均誤差0.041，舒張壓平均誤差-0.075，精確度至1mmHg。本研究延伸了矽壓阻式微感測器於商用及醫用儀器之應用價值。

關鍵字

微感測器 ； 矽質壓阻 ； 壓力計 ； 圖控式程式語言 ； 血壓計

並列摘要

This paper presents a readout circuit design and specific pressure system applications for silicon-based resistive type micro sensor in CMOS technology. Integrating with readout circuit, micro-controller AT89C51 and A/D converter, the sensor has been used to develop a generic, portable multi-purpose pressure meter. By interfacing with Si micro sensor, parts of commercial blood pressure meter, personal computer and virtual instrument LabVIEW, a prototype of blood pressure system has been realized for long-term monitoring usage. The measured range of generic pressure meter is from -291 to 100mmHg, and the accuracy is 5mmHg. The average sensitivity of blood pressure system is 0.041/-0.075 for systolic/diastolic measurements, and the accuracy is 1mmHg. The research extends the values of silicon pressure sensor for consumer and biomedical instrumental applications.

並列關鍵字

Silicon-based resistive type micro sensor ； pressure meter ； systolic/diastolic measure-ments ； blood pressure monitor