- 會議論文
三次元接觸式掃描探頭之結構設計與分析
Analysis of 3D Scanning Probe Structure
摘要
本研究主要目的為三次元接觸式掃描探頭之結構設計與分析，本研究之機構設計分為Z軸系統與XY軸系統兩部分，Z軸是以4根薄彈片將上下兩基座連接，並利用其特性達成Z軸垂直移動之目標。XY軸是採用微細樑設計之彈片，此彈片之設計目的在於將自由度限制為三個，並在結構中心安裝一頂針，以抑制Z軸位移，達成只有兩個自由度之特色。藉由有限元素軟體ANSYS的分析驗證，以求得三次元接觸式掃描探頭之靜態與模態分析，藉由分析之數據得知探球位移量與彈片之變形，是否符合本研究之設計，再求得其共振頻率。此外，以頻譜分析儀為實驗設備，量測探頭實體之共振頻率，進而與分析結果相互驗證。結果顯示ANSYS模態分析之結果與頻譜分析儀所量測之結果相近。從分析與量測之結果可避免探頭在量測過程中產生共振效應，以至於在量測上產生量測誤差。
並列摘要
The purpose of this study is to Analysis of 3D Scanning touch Probe structure and design. The mechanism of probe have two parts of the structural Z-axis system and XY axis system, Z-axis system structure is divided into upper and lower base and four thin fragments as a bonding of the components. The goal of the characteristics of thin fragments is the Z-axis vertical movement.For the design of the XY axis system is micro-beam. Structure can freedom limit of three. A live center is installed in the center of the structure to inhibit the Z-axis displacement, achieve the characteristics of only two degrees of freedom. Analysis and verification by using finite element software ANSYS, static Analysis and modal analysis was conducted on 3D scanning touch probe structure. the displacement of probe ball and deformation of spring by analysis of data compliance with the design of the study, and then obtain the resonance frequency. In addition, FFT Analyzer is used as the experimental instrument to measure the resonance frequency of probe. The measure results are then verified with the analyzed results from modal analysis. It shows that the frequency response obtained from modal analysis by using ANSYS are close to the measured results from FFT Analyzer. so as to prevent resonance effect caused by dynamic behaviors of scanning probe in measurement movement from causing measuring error.