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異方性導電膜之導電粒子破裂變形狀況之自動量測

An Automatic Measurement System for the Fracture Conditions of Anisotropic Conductive Film

摘要


本文提出TFT-LCD組合製程中之異方性導電膜之導電粒子破裂變形狀況自動化光學量測,運用機器視覺,針對導電粒子,進行圖形追蹤、定位、檢測及破裂變形狀況等相關製程量測工作。在對圖形進行運算處理前,會先經過特定的前處理轉換,再取適當的樣本,做比對計數,對於背景複雜的圖形,有不錯的效果,即處理後的粒子圖形與背景會有較佳的對比度。

並列摘要


In this paper an automatic optical measurement system for the fracture conditions of anisotropic conductive film(ACF) is presented. On the process of searching, analyzing, and recognizing of ACF-LCD images, the measurements include the quality verification and quantity calculation of ACF. We used different methods to determine the fracture factors and the ACF area for each type. The improving method of the template matching, and largely decreasing the time of checking the image for pattern matching was verified in the experimental results of this imaging system.

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