This research is to study the thin-film properties of polymer material. Three different monomers (PF, MEH and DB) are tested, with three different film thicknesses about several dozen to several hundred nano meters. Nano-indentation tests and nano-scratch tests were conducted in this research. Attempts were made to establish a theoretical model to analyze the mechanical property the thin-film of polymer. From the experimental results and theoretical analysis, it is concluded that parameter γ is related to the category of material, while the index m in the model is related to the thickness of the thin-film. It would be very beneficial that the theoretical model established through this research could be more widely applied to other researches on thin films of polymer materials.