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半導體廠對SEMI-S8 95人因工程規範認知及執行狀況之研究

A Study of the Implementation of SEMI-S8 95 Regulation Ergonomics in Semiconductor Plants

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摘要


半導體設備及原料協會(SEMI)訂定了一套標準的程序及準則(SEMI-S8-95),以求統一半導體製造的標準。這套準則關心的是人因工程方面的問題。在本研究中,收集及研究SEMI有關人因工程方面的規則或標準。原有的人因工程檢核表被翻譯成中文,以便做爲工廠內部的調查,並找出半導體廠的人因工程危害。運用設計過之問卷,用來量測超過十種不同形式半導體工廠之工程師及工人對人因工程的了解。共有43個半導體廠參與本研究。結果顯示大部分半導體廠有良好的危害標誌(73.5%),視覺警示(79.8%)及聽覺警示(78.5%);過半數的工廠沒有人因工程的專家;一般人因工程知識(50.0%)及人因工程設計評估(47.6%)爲半導體工廠做需要的人因工程科技。在半導體工廠已有進行過人因工程肌肉骨骼病症自我陳述方面的研究。透過本研究了解半導體廠對SEMI S8-95規則的了解,也期待工廠在人因工程上投入更多的心力及資源,以跟隨上SEMI人因工程的標準。

並列摘要


The Semiconductor Equipment and. Material Institute (SEMI) has written standard procedures and standards (SEMI-S2), and been looking forward to unite the IC manufacture standards. The SEMI standards have regarded ergonomics or human factors. In this research, SEMI or SEMATECH regulations and standards regarding ergonomics have been collected and understood. Ergonomics checklists & Questionnaires have been generated and transfer to Chinese for in plant survey to find the ergonomic hazards in the twenty semiconductor plants. The feasibility of implement has been studied in semiconductor plants. The results show: 1) Most semiconductor plants used many un-satisfy tools which may damage workers; 2) More than half of the plants did not have ergonomic professionals; 3) More than 10 plants did not know the SEMI-ergonomic standards; 4) Three plants have set the goal to match SEMI standards; 5) One typical ergonomic injury case has made more than two thousand working hours loss in one semiconductor manufacture plant; 6) Most IC manufacture plants need manpower and knowledge to revised their production line for the requirements of SEMI-S2 standards.

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