摘要
矽基液晶元件（Liquid crystal on silicon，LCoS）是目前在微型顯示應用上，關鍵的零組件技術之一。LCoS液晶盒結構下基板為CMOS電晶體晶片，與上基板抗反射ITO玻璃貼合並填充液晶後，可作為反射式的光閥或光相位調製元件。然而，矽基液晶為微米級二維像素陣列的反射式光電元件。倘若液晶盒間隙均勻性、材料穩定性、以及貼合對位、切割、封膠、注入等製程上缺乏精準控制，及高品質潔淨度的製程環境控制，都將嚴重影響LCoS製程良率。進而影響其光學品質，如大面積投影效果，及空間光相位調變的雜訊等。因此，無論後續開發LCoS在超高解析度、快速響應時間、低訊號干擾、多級相位控制等未來應用，有效提高製程的良率，是首要且必須面對的議題。
並列摘要
LCoS (Liquid Crystal on Silicon) is one of the key components in the micro-projector application. It is a reflective spatial light modulation device. Its panel is consists of top substrate, anti-reflection coated ITO glass, and bottom substrate, CMOS backplane, with liquid crystal filled in between. LCoS is a micro multi-pixel 2D-array reflective photonic device. Its optical properties will be seriously affected by LCoS cell assembly process under clean-room environment, and lacking of precise process control in the cell assembly, cutting, sealing, and filling steps. As a result, the processing issue needs to be well addressed before the application development in the ultra-high resolution, faster respond time, lower noise disturbance, and multi-phase control level.