- 期刊
Metal-Organic Chemical Vapor Deposition of Superconducting Metal Oxides
金屬有機化合物蒸氣沉積法製備超導金屬氧化物
並列摘要
Superconductivity has attracted attention in the scientific community since 1986 with the potential of widespread application of devices based on various physical phenomena surrounding superconductors being realized once T_c is greater than the boiling point of liquid nitrogen. For those application requiring the employment of thin films of these superconducting metal oxides, chemical vapor deposition appears to be the preferred method of fabrication at the present time. This paper briefs the history and the fabrication by MOCVD, then details the vaporization of precursors, kinetics, delivery control, mechanistic analysis of the process, microscopic analysis of YBCO formation by MOCVD and mechanistic studies with individual YBCO precursors.
並列關鍵字
無資料延伸閱讀
- 鄭力中（2018）。利用有機金屬化學氣相沉積法成長氧化鎵鋅磊晶膜之金氧半場效電晶體製作及其特性研究〔碩士論文，國立交通大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0030-0205201911093136
- 詹原毓（2017）。以雙電漿增強有機金屬化學氣相沉積法成長鎵摻雜氧化鋅〔碩士論文，國立虎尾科技大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0028-1307201720094400
- Chen, P. H. (2012). 以原子層沉積法製備金屬氧化物中空纖維及其光催化應用 [master's thesis, National Tsing Hua University]. Airiti Library. https://www.airitilibrary.com/Article/Detail?DocID=U0016-2002201315271372
- 蕭文澤、薛丁仁、黃國政（2020）。金屬氧化物半導體氣體感測器用材料回顧。科儀新知，(223)，63-76。https://www.airitilibrary.com/Article/Detail?DocID=10195440-202006-202007020015-202007020015-63-76
- Chou, J. C. (2014). 設計與製造金屬氧化物應用在光電化學分解水與超電容 [doctoral dissertation, National Tsing Hua University]. Airiti Library. https://doi.org/10.6843/NTHU.2014.00103