溫變式蜂巢狀沸石轉輪吸附揮發性有機排氣的特性研究

Performance Study of Thermal Swing Honeycomb Zeolite Adsorber for VOCs Treatment Application

張豐堂(Feng-Tang Chang) ； 白曛綾(Hsun-Ling Bai) ； 白寶實(Bau-Shei Pei) ； 劉邦昱(Pang-Yu Liu)

《環境保護》 28卷1期 (2005/06) Pp. 95-109

https://doi.org/10.30017/EP.200506.0008

摘要

隨著我國光電產業之次世代TFT-LCD產業急速擴張，行政院環保署即將公告實施「光電製造業空氣污染管制及排放標準」，擬對TFT-LCD產業之污染排放量加以管制。就現行已開發及商用之VOCs污染防制設備而言，以溫變式蜂巢狀沸石轉輪搭配焚化爐最為普遍，但是學術界甚少有關溫變式蜂巢狀沸石轉輪吸附特性的相關論述。因此，本文探討溫變式蜂巢狀沸石轉輪吸附面板業有機排氣的主要有機物包括異丙醇(IPA)、丙酮(acetone)、單甲基醚丙二醇乙酸酯(PGMEA)以及單甲基醚丙二醇(PGME)等四成份之吸附特性。結果顯示疏水性沸石轉輪對高沸點VOCs如PGMEA及PGME之親和力遠大於低沸點之IPA及Acetone，若欲處理次世代TFT-LCD面板廠的高排放濃度（相當於1500〜2400ppmTHC值）時，須將經過沸石轉輪的線速度下降、再生濃縮倍率減少、脫附再生溫度上昇亦或增加轉輪厚度，在適切之操作條件下，其針對次世代TFT-LCD面板廠排放的VOCs去除效率仍可輕易達到90%以上。

關鍵字

光電製造業 ； 空氣污染防制 ； 蜂巢狀沸石轉輪 ； 揮發性有機氣體 ； 高科技產業

並列摘要

The Environmental Protection Administration of Taiwan will soon enforce the ”Opto-Electronic Manufacturers′ Air Pollution Control and Emission Standard”. The VOCs emission quantity is thus expected to be controlled with special focuses on the next generation of TFT-LCD manufacturer s. One of the most popular VOCs treatment equipments for the next generation of TFT-LCD manufacture fab is the thermal swing adsorber of honeycomb zeolite rotor with thermal oxidizer. However limited information is available on the thermal swing adsorber of honeycomb zeolite rotor in the literature. This study intends to provide experimental data an d discuss the performance of the thermal swing adsorber of honeycomb zeolite rotor for the VOCs exhaust laden air that simulated the emission characteristics of an opto-electronic manufacturer′s fab. The results showed that the affinity of the high boiling point VOCs such as PGME and PGMEA on the zeolite adsorber is much larger than that of the low boiling point VOCs such as IPA and acetone. Under proper operation conditions of reducing the superficial velocity and the concentrate ratio, an d increasing the desorption temperature or the thickness of the adsorber, the THC removal efficiency can be well above 90% and thus meet the promulgating regulation.

並列關鍵字

TFT-LCD optoelectronic manufacture ； Air pollution ； Honeycomb zeolite rotor ； VOCs