Dynamic Behaviors Analysis of the Aerostatic Linear Guideway with a Passive Compensator for PCB Drilling Machine

具被動補償器之PCB鑽孔機氣靜壓導軌動態特性分析

陳明飛(Ming-Fei Chen) ； 黃韋倫(Wei-Lun Huang) ； 蕭文澤(Wen-Tse Hsiao)

《中國機械工程學刊》 30卷2期 (2009/04) Pp. 115-123

https://doi.org/10.29979/JCSME.200904.0005

摘要

由外部供給氣體之氣靜壓導軌已成功應用於PCB鑽孔機。在本篇文章中，我們分析了具被動補償器之配流槽氣靜壓止推軸承，以及應用此型軸承之氣靜壓導軌的動態特性。本文採用Resistance Network Method (RNM)解析具擠壓膜效應之流量連續方程式，並配合Newmark數值積分法進行具時變性的動態特性分析。
本文研究顯示，具被動補償器之氣靜壓止推軸承與導軌，可以維持合適的氣膜間隙，達到精確的直線運動並降低振動的振幅。

並列摘要

Externally pressurized gas-lubricated linear guideway has been successfully used in the PCB drilling machine. In this paper, we analyze the performance of the grooved aerostatic thrust bearing with passive compensator and the dynamic behaviors of aerostatic linear guideway with compensating aerostatic thrust bearings. The Newmark integration method and the modified resistance network method (RNM), which consider the equilibrium of mass flow rate and the squeeze film effect, use to analyze the time-dependent dynamic behaviors. The results indicate that the passive compensator could maintain the thrust bearing in the suitable film gap. Therefore, the aerostatic linear guideway could achieve accurate straight motion and reduce vibration amplitude.

並列關鍵字

Gas-lubricated linear guideway ； Passive compensator ； PCB drilling machine ； Newmark integration method ； resistance network method ； dynamic behaviors