Measurement Simulation of Nanoscale Semicircle Profile by Constant-Amplitude Tapping Mode Atomic Force Microscopy (TM-AFM) and Influence of Probe Shape on Scanning Profile

奈米級半圓形試片輪廓之定振幅輕敲式原子力顯微鏡模擬量測及探針型狀對掃描輪廓影響分析

林榮慶(Zong-Ching Lin) ； 黃俊傑(Jun-Jie Huang)

《中國機械工程學刊》 32卷3期 (2011/06) Pp. 199-207

https://doi.org/10.29979/JCSME.201106.0003

摘要

本文主要是分析及建構定振幅輕敲式原子力顯微鏡(TM-AFM)之奈米級模擬量測一半圓形試片的模型。本文使用矽(Si)原子之晶格排列出TM-AFM之矩形懸臂探針針尖(Tip)與半圓形試片之原子模型，且以莫氏力來計算試片與探針之作用力，配合所推導之TM-AFM振動方程式，建構出TM-AFM定振幅奈米級模擬量測模型。本文以所建立之TM-AFM定振幅之奈米級模擬量測模型來模擬與分析原子力顯微鏡量測半圓形試片之形貌與誤差結果，並與理想半圓形試片之掃描輪廓曲線結果相比較，以驗證本研究模擬量測模型之合理性。本文同時針對具有相同探針尖端圓角半徑但有不同外形斜邊角度的不同探針，以理想半圓形奈米級試片進行原子力顯微鏡模擬量測，並探討不同外形斜邊角度對掃描輪廓曲線的影響，結果發現模擬之掃描半圓形輪廓與理想半圓形輪廓之誤差原因主要受到模擬探針之幾何外型的影響。以及試片表面形貌的影響。

並列摘要

This article mainly analyzed and developed a nanoscale simulative measuring model of constant-amplitude Tapping Mode Atomic Force Microscopy (TM-AFM) for simulating a nanoscale semicircle sample profile. By using the lattices of silicon (Si) atoms, the atomic models for TM-AFM rectangular cantilever probe tip and a semicircle sample could be arranged. Morse force was adopted to calculate the action force between the sample and the probe. Also using the induced TM-AFM vibration equation, the study constructed a TM-AFM constant-amplitude nanoscale simulative measuring model.The established TM-AFM constant-amplitude nanoscale simulative measuring model was used to simulatively measure the appearance of a semicircle sample and analyzed the results of error. The simulation results were compared with the curve of the ideal semicircle sample, so as to verity the rationality of the simulative measuring model developed by this study. At the same time, focusing on the different probes having the same probe tip radius but different bevel-angled shapes, the study used an ideal semicircle nanoscale sample to perform simulative measurement by TM-AFM, and investigated the influence of the probes with shapes at different bevel angles on the simulation curves of the semicricle profiles. As found in the research results, the error between the simulatively scanned semicircle profile and the ideal semicircle profile was mainly caused by the influence of the geometric shape of the simulated probe and the surface appearance of the semicricle sample.

並列關鍵字

Tapping Mode Atomic Force Microscopy TM-AFM ； rectangular cantilever probe ； nanoscale measurement ； semicircle