Theoretical and Experimental Design of a New Flexible Hinged Positioning Stage

新型撓性鉸鍊平台之理論及實驗設計

黃宜正(Yi-Cheng Huang) ； 李春穎(Chun-Ying Lee) ； 陳麒任(Chi-Ren Chen)

《中國機械工程學刊》 33卷1期 (2012/02) Pp. 59-62

https://doi.org/10.29979/JCSME.201202.0007

摘要

本文之目的為設計一個新的精密壓電致動器之撓性鉸鍊定位平台，為了改善平台動態特性，設計出具板狀彈簧及刻痕彈簧之樣式，並應用卡式定理（Castigliano Theorem）及拉格朗其（Lagrange）方程式來推導出平台新的整體結構和動態特性。在田口直交表（L(subscript 9)）及ANSYS有限元素分析進行最佳化設計之中；應用變異數分析（ANOVA）之加法模式來確認最佳化參數；當壓電平台在有拘束的條件下，ANSYS模擬分析與理論分析的自然頻率誤差約14%。壓電平台在無拘束的條件下，ANSYS模擬分析與實驗分析前六模態誤差均小於3％。故本研究所提出一撓性鉸鍊平台，可建構出能達到較佳動態特性之微定位平台。

並列摘要

In this paper, a new flexible hinge (FH) positioning monolithic stage has been designed to cooperate with Piezoelectric (PZT) actuator for ultra-fine position application. To improve the dynamic characterization of the stage in positioning, the leaf type and notch type springs are considered. The Castigliano theorem and Lagrange's equation are applied and dynamic characterization of the stage is obtained. Taguchi Orthogonal Array Table (L9) is performed to design the finite element numerical simulations by ANSYS. Analysis of Variance (ANOVA) with additive model confirms the optimal geometry parameters of FH stage thereof. When the stage is constrained, theoretical result of natural frequency is 14% different from ANSYS result. With free-free boundary, experimental mode shapes of the initial six natural frequencies are under 3% variation with ANSYS results. Design FH stage has been proposed to establish a new micro positioning stage achieving better dynamic characterization.

並列關鍵字

Piezoelectric actuator ； Flexible hinge ； Precision motion stage ； Modal analysis