High Intensity Ultra-Short Pulse UV Laser System Using Opto-Mechatronics Design Techniques

光機電整合設計技術在高功率超短脈冲紫外波長雷射系統應用

陳振文(June-Wen Chen) ； 洪傳盛(Chuan-Sheng Hong) ； 邱利安(Li-An Chiu) ； 段景斌(Jing-Bin Duan) ； 康雅萍(Ya-Ping Kang)

《中國機械工程學刊》 34卷5期 (2013/10) Pp. 421-430

摘要

本文旨在探討應用光機電整合設計技術建立複雜多用途的超高功率超短脈冲紫外波長雷射系統。我們發展建立了一套兆瓦超高功率、飛秒超短脈冲、248.6奈米紫外波長雷射系統。本雷射系統由藍綠波長飛秒超短脈冲串雷射為種子雷射輸出，經過三級四通道染料雷射放大器放大輸出；再經過倍頻晶體轉換成紫外波長；導入氟化氪準分子雷射腔體放大；放大的輸出經過紫外波長空間濾波器消除雜波，再導入原來的氟化氪準分子雷射腔體，做更高的功率及能量放大。我們的雷射系統輸出可以多層次調控為單脈冲至十數及數十脈冲重複率的超高功率超短脈冲紫外波長雷射主系統輸出；及高功率超短脈冲可見光波長雷射和各波段可調波長飛秒超短脈冲串雷射次系統輸出。是一套多層次多用途的雷射系統。其中雷射放大器中種子雷射脈冲串與磊浦時序同步控制是電光技術。各級放大器的種子雷射脈冲串與磊浦作用體積調整是光機技術；雷射放大器的自發放大輻射時序波形和種子雷射與磊浦作用體積大小控制是光機電整合技術。我們以雷射知識為基礎，使用光機製圖設計模模擬調光技巧；設計製造雷射光脈冲串與磊浦時序同步控制電子電路；設計控制多組雷射放大器整合控制電路；確實可以直接準確有系統的推導、模擬、分析、組合架設非常複雜的雷射系統產品。

並列摘要

We have developed a multi-levels selective high intensity ultra-short pulse UV laser system with terawatts high intensity, sub-hundred femto-second ultra-short pulses, 248.6 nm ultraviolet laser system, with seed laser in blue-green regime, amplified in the multi-stage dye amplifiers chain and then frequency doubled and finally amplified with multiple-passes in the KrF amplifier. Our complete laser system is transmutable to various selective subsystems of ultra-high intensity UV laser source, high intensity visible laser source and ultra-short pulses blue-green laser source. This system can be operated in single shot pulse mode and in various repetition rates modes. The optimized design in the laser system have been analyzed, simulated by opto-mechanics design techniques and verified in the system. The synchronization control in the laser system to have highest amplification and the maximum energy extraction were designed and optimized. The opto-mechatronics design technologies improve the efficiency of the complicate laser system.

並列關鍵字

high intensity ； ultra-short pulse ； UV laser system using ； opto-mechatronics design