Thermal Stability of SnOx/NiCrOx/Ag/AZO/SnOx/glass Multilayer Films Applied in Low-emissivity Glass

用於低輻射玻璃的氧化錫／氧化鎳鉻／銀／氧化鋁鋅／氧化錫／玻璃多層膜其熱穩定性

張慎周(Shang-Chou Chang) ； 林天財(Tien-Chai Lin) ； 陳宏仁(Hon-Zen Cheng) ； 沈藝林(Yi-Lin Shen) ； 洪上超(Shang-Chao Hung) ； 葉昌鑫(Chang-Sin Ye) ； 蕭育仁(Yu-Jen Hsiao)

《中國機械工程學刊》 39卷4期 (2018/08) Pp. 427-431

摘要

Low-emissivity glass is heat-block glass with high transmission in visible and high reflectivity in infrared region. Silver-based multilayer films is the potential candidate applied in low-emissivity glass compared with others. Low-emissivity glass usually needs high temperature process like bending or toughening process in industry. Characteristics of low-emissivity may deteriorate for low-emissivity glass after high-temperature process. The tin oxide/nickel chromium oxide/silver/ aluminum doped zinc oxide/tin oxide/glass (SnOx/NiCrOx/Ag/AZO/ SnOx/glass) and silver/aluminum doped zinc oxide/ tin oxide/glass (Ag/AZO/SnOx/glass) samples were produced by in-line sputtering. Part of the two samples was post treated with one hour and 500°C heat process. Microstructure, optical properties and emissivity of heated SnOx/NiCrOx/Ag/AZO/SnOx/ glass show no evident change compared with those of as-deposited samples. However, microstructure and optical properties apparently alter and the emissivity degenerate from 0.10 to 0.32 for heated Ag/AZO/ SnOx/glass samples. The outer layer: SnOx/ NiCrOx on Ag films can effectively prevent Ag agglomeration resulted from heat treatment. This paper contributes to the development of low-emissivity glass applied in energy-saving buildings.

關鍵字

thermal stability ； low-emissivity glass ； silver

並列摘要

低輻射玻璃是隔絕熱的玻璃，它在可見光範圍具高穿透且在紅外線範圍具高反射特性。以銀為基底的多層膜是目前市面上最常使用的低輻射玻璃材料。低輻射玻璃製造過程通常需要高溫處理例如彎曲或硬化過程。經加熱後材料的低輻射特性可能變差。氧化錫/氧化鎳鉻/銀/氧化鋁鋅/氧化錫/玻璃和銀/氧化鋁鋅/氧化錫/玻璃試片使用直線式連續濺鍍做出。這兩類試片再經500°C，1小時的熱處理。結果顯示氧化錫/氧化鎳鉻/銀/氧化鋁鋅/氧化錫/玻璃經熱處理後其微結構，光特性和低輻射係數並無明顯改變。但銀/氧化鋁鋅/氧化錫/玻璃試片經熱處理後其微結構，光特性改變，且低輻射係數從0.10升到0.32。氧化錫/氧化鎳鉻/銀/氧化鋁鋅/氧化錫/玻璃的外層氧化錫/氧化鎳鉻層可有效的防止銀層團聚改變。這篇文章對節能建築有貢獻。