Microstructures and NO2 Sensing Properties of Vanadyl Phthalocyanine Thin Films

釩氧?花青薄膜之微觀結構與二氧化氮感測性質

劉進興(C. J. Liu) ； 候文成(W. C. Hou) ； 朱義旭(Y. H. Ju)

《Journal of the Chinese Institute of Chemical Engineers》 31卷3期 (2000/05) Pp. 237-242

https://doi.org/10.6967/JCICE.200005.0237

摘要

真空蒸鍍參數可以影響釩氧?花青薄膜的微觀結構，如晶相及表面形態；微觀結構則進一步影響巨觀性質，如氣體感測特性。本研究透過改變蒸鍍速率及基板溫度可以得到Ⅱ相，Β相，相及非晶相的釩氧?花青薄膜。Ⅱ相薄膜經過在空氣中250℃的熱處理3小時後，又可轉化為Ｂ相。穩態氣體感測電流在感測溫度為190℃時最大。當蒸鍍速率固定時，Ｂ相釩氧?花青薄膜對二氧化氮的響應及恢復速度最快。Ｂ相薄膜之中，又以蒸鍍速率較高者的響應及恢復速度較快。本研究顯示，Ｂ相釩氧?花青薄膜適於用來感測二氧化氮。

並列摘要

We have shown in this study that deposition condition would determine the microstructure, i. e., crystal phase and surface morphology, of the vacuum evaporated VOPc film, which in turn would determine the macroscopic properties, e. g. , gas response characteristics, of the deposited film.. By manipulating substrate temperature and deposition rate, VOPc films with phase II, phase B, phase C and amorphous structures can be obtained, and the phase II structure can be converted into phase B after 3 hours of annealing at 250’C in air. For N gas sensing, steady-state sensor current exhibits a maximum at the operating temperature of 190’C. Among different crystal phases of VOPc films, the phase B film shows the fastest response and recovery characteristics at fixed deposition rate. Among different morphologies of phase B films, those deposited at the highest rate would exhibit the fastest response and recovery. We have demonstrated that the phase B film of VOPc is a promising candidate for gas sensing.

並列關鍵字

Vanadyl Phthalocyanine ； Crystal Phase ； Gas Sensor ； NO2