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利用實驗設計法分析氧化鋁燒結參數之影響

Statistic Analysis of Sintering Parameters of Al2O3 by Experimental Design

摘要


本實驗採用高純度、次微米之θ相氧化鋁粉末,添加α相晶種,使用膠體製程、高壓壓濾和適當的乾燥過程,製作均質的生坯體,然後在≥1480ºC燒結。藉由實驗設計法,以定量方式,分析燒結體的燒結密度與晶粒尺寸,探討燒結參數的影響,找出最佳燒結過程的各項參數,進而得到具有小晶料、高密度之氧化鋁陶瓷。實驗結果發現,利用實驗設計法得到的燒結最佳條件分成兩部份,一是最佳密度及最佳晶粒的製程條件。經由驗證實驗可以得到相對密度99.7%,或平均晶粒2.8μm的燒結體。此外,也以變異數分析法分析上述結果,得知燒結溫度、θ至α相變溫度、相變持溫時間及升溫速度等四個因素對於燒結密度及平均晶粒之影響程度。

並列摘要


High purity submicrometric θ-phase alumina powder was used and investigated. The samples with α-phase seeds were first pressure-filtrated and dried to make uniform green bodies, then sintered at ≥1480ºC. The relationship of the sintered density and average grain size of the Al2O3 was quantitatively studied as influenced by four sintering parameters. Fine grain and high density Al2O3 could be made by the optimized conditions which were identified for best density or smallest average grain size. The results appeared that the Al2O3 with 99.7% theoretical density or 2.8μm average grain size could be repeatedly obtained. Besides, the results were also analyzed by ANOVA method. The influence of the four parameters, sintering temperature, θ-to-α transformation temperature, holding time at transformation, and ramping rate were analyzed and reported.

被引用紀錄


范乃中(2016)。積層製造使用之陶瓷胚料合成及應用研究〔碩士論文,國立臺灣大學〕。華藝線上圖書館。https://doi.org/10.6342/NTU201610378
Kyaw, A. T. (2015). 閘極重疊結構之鍺源穿隧電晶體 [master's thesis, National Tsing Hua University]. Airiti Library. https://www.airitilibrary.com/Article/Detail?DocID=U0016-0312201510310367

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