濺鍍碳摻雜二氧化鈦薄膜之光觸媒性質

Reactively Sputtered Carbon-doped Titanium Oxide Films as Visible-Light Induced Photocatalyst

王順輝(S. H. Wang) ； 黃瓊儀(C. Y. Huang) ； 翁明壽(M. S. Wong)

《材料科學與工程》 38卷2期 (2006/06) Pp. 93-97

https://doi.org/10.6409/JMSE.200606.0093

摘要

利用磁控濺鍍系統已成功沉積碳摻雜二氧化鈦薄膜，摻雜來源爲使用石墨靶和金屬鈦靶在Ar、O2電漿氣氛下進行共濺鍍，並改變石墨靶靶槍功率來探討TiO(下標 2-x)C(下標 x)薄膜之結晶結構、光吸收性質、成分分析與光催化活性。實驗結果顯示碳摻雜TiO2薄膜的結構仍爲銳鈦礦(Anatase)相，且吸收波長往可見光區位移，最多可位移至約450nm。而TiO(下標 2-x)C(下標 x)薄膜在可見光照射下，具有較純銳鈦礦相二氧化鈦佳的光觸媒活性。從XPS成分分析結果顯示隨著石墨靶靶槍功率增加，摻雜的碳含量也隨之遞增，且吸收波長往可見光區位移量也越多。亞甲基藍溶液分解實驗和銀還原實驗結果也顯示碳含量越高，薄膜的光催化活性也就越高。隨著照光時間增加，TiO(下標 2-x)C(下標 x)薄膜的水接觸角會趨近於0°，展現出極佳的親水性。

關鍵字

相銳鈦礦 ； 二氧化鈦 ； 碳摻雜二氧化鈦 ； 光觸媒

並列摘要

Carbon-doped titanium oxide (TiO(subscript 2-x)C(subscript x)) films in anatase structure were deposited on silicon and quartz substrates by reactive magnetron sputtering. A metallic titanium target and a graphite target were co-sputtered simultaneously in a gas mixture of argon and oxygen. The power of Ti target was fixed at 250 W while the power of graphite target varied from 100 W to 350 W. The incorporation of carbon into TiO2 extended the spectral response to the visible region about 450 nm and exhibited visible-light induced photocatalytic properties in the photoreduction of silverions and in the degradation of methylene blue (MB). The photocatalytic activity of TiO(subscript 2-x)C(subscript x) films was relative to the carbon concentration. The best photocatalytic activity is obtained in the film of the most carbon concentration, with a degradation rate-constant (k) about 0.108 hr^(-1) of MB under visible-light illumination, and with superhydrophilicity of water contact angle near zero.

並列關鍵字

Anatase ； Titanium dioxide ； Carbon-doped titania ； Carbon-covered titania ； Visible-light photocatalyst