以陽極氧化法於鈦板上沈積含鈣、磷之氧化層

Calcium-and Phosphorus-containing Oxide Layer on Titanium Fabricated by Anodic Oxidation

劉建宏(J. H. Liu) ； 陳懋德(M. T. Chen) ； 林招松(C. S. Lin)

《材料科學與工程》 38卷3期 (2006/09) Pp. 133-138

https://doi.org/10.6409/JMSE.200609.0133

摘要

本研究以陽極氧化法於鈦板上成長含鈣及磷的氧化膜，針對不同的氧化電壓分別對其進行各階段的氧化層觀察，包含電壓－時間曲線（V-t圖）量測、掃描式電子顯微鏡(SEM)的表面觀察、X射線繞射分析儀(XRD)的結晶結構分析、穿透式電子顯微鏡(TEM)的橫截面分析、能量散射光譜儀(EDS)成份分析等。由V-t圖的斜率變化將陽極化過程分爲三個區域：第一個區域的氧化層厚度穩定增加，以及二、三區域的微弧氧化反應。微弧氧化反應會生成多孔性的氧化膜，其中成份富含鈣、磷。同時，氧化電壓愈高時，所得氧化膜其中鈣、磷的含量也隨之增加。此外，橫截面分析結果將氧化層分爲內外兩層，鈣、磷的含量以外部的非晶質氧化層最高。本文將就以上所得結果，對此製程的氧化膜成長過程及機制進行詳細討論。

關鍵字

陽極處理 ； 微弧氧化 ； 極化曲線 ； SEM ； TEM

並列摘要

Calcium (Ca)-and phosphorus (P)-containing oxide layer on titanium plate was fabricated via anodic oxidation in a solution containing calcium and phosphorus compounds. The plate galvanostatically anodized to various voltages was characterized using SEM, XRD, and cross-sectional TEM/EDS. Based on changes of the slope of the voltage response curve, the whole anodizing process can be divided into three stages with different voltage ranges. During the first stage, the anodic film slightly grew as anodization proceeded. In the last two stages, sparking and micro-arc oxidation started to take place, giving rise to the formation of rough oxide layer with numerous open craters. Concurrent with sparking, Ca and P species were incorporated in the anodic film, and their content increased with increasing anodizing voltage. Cross-sectional TEM revealed that the oxide layer formed after sparking consisted of an inner titanium oxide layer and a Ca/P-containing major overlay. The major overlay comprised crystalline and amorphous regions, in which more Ca and P was detected in the amorphous region. The growth and formation mechanism of the anodic film was discussed in details based on the microstructural evolution of the coating.

並列關鍵字

anodic oxidation ； micro-arc oxidation ； SEM ； cross-sectional TEM