稀土氧化物（Y、Sm及Gd）和氧化鈣添加對氮化鋁（AlN）燒結體之熱、電及機械性質研究

Effects of rare-earth oxides and CaO additives on Aluminum Nitride ceramics' thermal, electrical, and mechanical properties

朱智鴻(C.H. Chu) ； 林志朋(C.P. Lin) ； 溫紹炳(S.B. Wen) ； 申永輝(Y.H. Shen)

《鑛冶：中國鑛冶工程學會會刊》 53卷4期 (2009/12) Pp. 61-66

https://doi.org/10.30069/MM.200912_53(4).0006

摘要

本研究以添加不同稀土氧化物（Y、Sm及Gd）及氧化鈣等複合式燒結助劑進行氮化鋁燒結試驗，探討添加劑種類對試片在液相燒結過程的緻密化行為、晶界二次相分佈及晶粒生長型態的差異性對後續燒結體的熱、電及機械性質影響。試片經由XRD晶相分析主要結晶相與二次相種類、掃描式電子顯微鏡（SEM）觀察微結構晶粒大小與二次相分佈位置、熱傳導分析儀量測燒結體的熱傳導值、阻抗分析儀量測試片介電常數及損失因子及維氏硬度儀量測燒結體維氏硬度。實驗結果顯示添加氧化釔與氧化鈣的燒結試片熱傳導值及維氏硬度值分別為147 Wm^(-1) K^(-1)和11.86 GPa，明顯高於分別添加氧化釤及氧化釓的熱傳導值108和106 Wm^(-1) K^(-1)及維氏硬度值11.85和11.73 GPa。且添加氧化釔與氧化鈣的燒結試片介電常數8.74也低於分別添加氧化釤及氧化釓的介電常數值，而添加氧化釓的試片介電損失4.42x10^(-4)為最低。

關鍵字

氮化鋁 ； 稀土氧化物 ； 氧化鈣 ； 熱傳導 ； 介電常數 ； 維氏硬度

並列摘要

The additive effects of three different rare-earth oxides and CaO on the thermal, electrical, and mechanical properties of sintered Aluminum Nitride ceramics (AIN) were investigated by X-ray diffraction (XRD) and scanning electron microscope (SEM). The sintering behavior, distribution of grain boundary phases, and morphology of grain growth show the effect of the additives. Results of this study show that the thermal conductivity and Vicker's hardness of the AlN ceramic with Y_2O_3-CaO additive were 147 Wm^(-1)K^(-1) and 11.86 GPa, respectively. However, with Sm_2O_3-CaO and Gd_2O_3-CaO additives the thermal conductivity were limited to 108 and 106 Wm^(-1)K^(-1), and Vicker's hardness to 11.85 and 11.73 GPa, respectively. The dielectric constant of AlN with Y_2O_3-CaO additive was 8.74, which are lower than that of AlN with Sm_2O_3-CaO and Gd_2O_3-CaO additives. The Gd_2O_3-CaO additive has the lowest AIN dielectric loss at 4.42x10^(-4) (1 MHz).

並列關鍵字

Aluminum Nitride ； rare-earth oxides ； CaO ； thermal conductivity ； dielectric constant ； Vicker's hardness