利用直流脈衝電漿輔助化學氣相沉積法蒸鍍DLC薄膜於氮氧化處理Vanadis 10工具鋼之性質研究

Investigation of the Properties of DLC Films on Oxynitriding-treated Vanadis 10 Tool Steel by DC-pulsed Plasma Enhanced CVD Process

張世賢(S.H. Chang) ； 游孟勳(M.H. Yu) ； 黃建中(J.J. Huang) ； 溫昱丞(Y.C. Wen)

《鑛冶：中國鑛冶工程學會會刊》 64卷2期 (2020/06) Pp. 44-53

https://doi.org/10.30069/MM.202006_64(2).04

摘要

本研究是以直流脈衝電漿輔助化學氣相沉積法，於氮氧化處理後之Vanadis 10工具鋼沉積類鑽碳薄膜，實驗參數為改變不同的脈衝電壓（-2、-3、-4及-5kV），並藉由拉曼光譜、壓痕試驗、磨耗試驗與表面形貌分析等，以評估類鑽碳薄膜的性質。研究結果顯示，Vanadis 10工具鋼經過氮氧化處理後，能夠形成深度約68 μm的氮氧化層，且表面硬度增加為1293 HV_(0.05)。而本研究使用非對稱式雙極直流脈衝的方式，經由適當的脈衝頻率（10kHz）和脈衝電壓（-3kV），且工作週期為17%、鍍膜時間為90分鐘，以及甲烷流量15sccm和氬氣流量1.5sccm時，所沉積之類鑽碳薄膜具有最佳的機械性質。同時根據拉曼分析結果顯示，此製程參數所沉積之薄膜擁有最低的I_D/I_G值（0.51），顯示其有較高比例的sp^3鍵結；而在磨耗試驗中，其具有最低的磨耗體積損失量（荷重2N為3.49×10^(-3) mm^3，以及荷重5N為4.08×10^(-3) mm^3）。綜合以上分析結果，Vanadis10工具鋼經過複合表面處理（ONC/DLC）後，確實能有效改善其性能，進一步達到提升使用壽命之目的。

關鍵字

電漿輔助化學氣相沉積法 ； 氮氧化處理 ； Vanadis 10工具鋼 ； 類鑽碳膜 ； 拉曼光譜 ； 磨耗

並列摘要

In this study, DLC films were coated on the oxynitriding-treated Vanadis 10 tool steel using the DC-pulsed plasma CVD technique. The different experimental parameters included the pulsed voltage (-2, -3, -4 and -5 kV). In addition, the properties of DLC films were measured by Raman spectroscopy, Rockwell indentation, wear tests, and surface morphology analysis, respectively. The experimental results showed that after oxynitriding treatment, the Vanadis 10 tool steel could form an oxynitriding layer with a thickness of about 68 μm. Meanwhile, the surface hardness increased to about 1293 HV_(0.05). Moreover, the duplex coating layers consequently had optimal properties when the DLC films were treated with an asymmetric bipolar-pulsed voltage that had the appropriate pulse frequency (10 kHz) and pulse voltage (-3 kV). Meanwhile, the duty cycle was 17%, the deposition time was 90 min, the gas flow of CH_4 was maintained at 15 sccm, and the gas flow of Ar was at 1.5 sccm, respectively. The results of the Raman spectroscopy indicated that the most of the sp^3 bond content in the DLC films was due to the lowest I_D/I_G value (0.51). The wear tests showed the lowest wear volume loss when the load of 2 N and 5 N was 3.49×10^(-3) mm^3 and 4.08×10^(-3) mm^3, respectively. Overall, the study results confirmed that the duplex surface treatment (ONC/DLC) could effectively improve the properties of Vanadis 10 tool steel and extend the tool life.

並列關鍵字

DC-pulsed PECVD ； Oxynitriding Treatment ； Vanadis 10 Tool Steel ； Diamond-like Carbon ； Raman Spectroscopy ； Wear