真空濺鍍及大氣電漿噴塗製程於SUS441表面鍍覆MnCo_2O_4保護層之微結構及電性比較

Effects of Coating Process on the Microstructural and Electrical Properties of MnCo_2O_4 Protective Film Coated SUS441 by Using Pulsed-DC Magnetron Sputtering and Atmospheric Plasma Spraying

曾惠萍(H.P. Tseng) ； 劉建國(C.K. Liu) ； 雍敦元(T.Y Yung) ； 張鈞量(C.L. Chang) ； 程永能(Y.N. Cheng) ； 李瑞益(R.Y. Lee)

《鑛冶：中國鑛冶工程學會會刊》 66卷2期 (2022/06) Pp. 91-101

https://doi.org/10.30069/MM.202206_66(2).07

摘要

本研究以SUS441不銹鋼為基板，做為高溫固態氧化物燃料電池（Solid oxide fuel cells, SOFCs）金屬連接板，表面分別以脈衝直流磁控濺鍍（Pulsed-DC Magnetron Sputtering, PDCMS）及大氣電漿噴塗（Atmospheric Plasma Spraying, APS）方式鍍覆MnCo_2O_4錳鈷氧化物做為保護膜，鍍膜厚度分別為5.0±0.5μm、60±20μm，以電子顯微鏡分析觀察保護膜組成及微結構，並於800°C空氣下熱處理5600小時，比較鍍膜試樣之高溫面積比電阻。研究結果顯示，兩種製程製備之保護膜只要達到一定的厚度，在5600小時測試範圍內，皆可滿足SOFC操作條件下之抗氧化需求，惟因APS製程之特性，初鍍膜之裂隙較大及孔洞較多，熱處理過程中出現短暫之元素分布差異，待熱處理時間增加，MnCo_2O_4膜層變為緻密且結構趨於穩定之晶相生成，其電性與PDCMS製程之試片接近。

關鍵字

錳鈷氧化物 ； SUS441連接板 ； 脈衝直流磁控濺鍍 ； 大氣電漿噴塗 ； 高溫固態氧化物燃料電池

並列摘要

We investigated the microstructural and electrical properties of MnCo_2O_4 protective film coated SUS441, which is employed as metallic interconnect in solid oxide fuel cell (SOFC) stack, after aging at 800 °C for 5600 hours in air. The thickness of MnCo_2O_4 films deposited on the surface of SUS441 were 5.0 ± 0.5 μm and 60 ± 20 μm by using Pulsed-DC magnetron sputtering technique (PDCMS) and atmospheric plasma spraying method (APS), respectively. Our results show that both of the protective layers prepared by the different processes meet anti-oxidation requirements after aging at elevated temperatures for 5600 hours. The as-sprayed film possesses a lot of cracks and holes due to the characteristics of the APS process. However, the MnCo_2O_4 film becomes dense and stable after a long-term heat treatment. Therefore, it shows a similar ASR values to the MnCo_2O_4 film which deposited by PDCMS technique.

並列關鍵字

Manganese cobalt oxide ； SUS441 ； interconnect ； Pulsed-DC magnetron sputtering technique ； Atmospheric plasma spraying method ； Solid oxide fuel cell

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