Effect of a Titanium Underlayer on the Ohmic Contact of Single-Walled Carbon Nanotubes

Sookhyun Hwang ； Youngjoo Kim ； Hyonkwang Choi ； Minhyon Jeon ； Sooyeon Lee

《Chinese Journal of Physics》 49卷5期 (2011/10) Pp. 1102-1110

並列摘要

In this study, we have prepared a single-walled carbon nanotube (SWNT) on patterned Fe/Al multilayered catalysts having a Ti underlayer by thermal chemical vapor deposition. The SWNT was contacted by Au/Ti electrodes and treated by a rapid thermal annealing method at 800℃ for 1 min. The lowest resistance obtained between the contacts of the the SWNT sandwiched between the electrode Au/Ti and Ti underlayer was 7.2 kΩ. This measured value approaches the theoretical minimum resistance of a metallic SWNT ballistic conductor with perfect contacts. In this manner, the presence of a Ti layer under the catalyst during the growth of SWNTs has an influence on the decrease of the contact resistance between an individual SWNT and a metal electrode.