雙軸液靜壓車床之精度與加工特性

本文探討自製雙軸液靜壓車床之運動精度與加工特性，並與Moore超精密車床之加工結果比較。此車床之機座是以花崗岩製作，導軌使用對稱封閉式液靜壓滑軌，油壓供應系統使用伺服馬達泵浦附蓄壓器以穩定供油壓力，並以線性馬達驅動平台。由精度量測結果顯示X軸雙向定位精度為1.391 μm、重複精度為1.28 μm、水平直度為19.81 μm、垂直直度為4.5 μm；Z軸雙向定位精度為1.345 μm、重複精度為1.016 μm、水平直度為5.26 μm、垂直直度為6.18 μm。另外，切削試驗是針對鋁合金試件，以主軸轉速2000 rpm、進給速率5 mm/min、切削深度5 μm、刀鼻半徑1.002 mm進行加工。可得平面試件之輪廓精度（PV）為0.283 μm/42.6 mm、表面粗糙度為Ra 0.0281 μm；球面試件之輪廓精度為0.178 μm/10.8 mm、表面粗糙度為Ra 0.0255 μm，由此可知，此自製雙軸液靜壓車床可達到次微米的加工精度。

關鍵字

液靜壓滑軌；鑽石車削；次微米工具機

並列摘要

In this study a biaxial hydrostatic lathe was designed and fabricated, and the moving precision and the machining characteristics of the machine were investigated; the results were compared with the data for Moore's ultra-precision lathe. The base of the machine was made of granite and the frame was composed of closed-loop hydrostatic slideways; a servo motor pump with accumulator was used to supply steady hydraulic pressure and the carriage was driven by a linear motor. Results of accuracy measurements indicated that in X-direction the bidirectional positioning accuracy was 1.391 μm, repeatability was 1.28 μm, horizontal straightness was 19.81 μm and vertical straightness was 4.5 μm; in Z-direction the bidirectional positioning accuracy was 1.345 μm, repeatability was 1.016 μm, horizontal straightness was 5.26 μm and vertical straightness was 6.18 μm. A machining test for aluminum alloy samples was performed using a diamond tool with a nose radius of 1.002 mm, at a spindle speed of 2000 rpm, a feeding rate of 5 mm/min, and a cutting depth of 5 μm. For planar samples the form error (PV) was 0.283 μm/42.6 mm and the surface roughness was Ra 0.0281 μm; for spherical samples the form error (PV) was 0.178 μm/10.8 mm, the surface roughness was Ra 0.0255 μm. The results indicate that the biaxial hydrostatic lathe fabricated by the authors can produce samples with sub-micron machining accuracy.

並列關鍵字

hydrostatic sideway ； diamond turning ； sub-micron machine tools

國際替代計量

雙軸液靜壓車床之精度與加工特性

全文下載

主題瀏覽