This study used DC sputtering to prepare thin films of high entropy AlCrTaTiZr alloy and nitride films and investigated their mechanical and anti-corrosion properties. The elemental compositions of the samples were characterized by electron probe x-ray microanalysis. The crystallographic phases and hardness of the thin films were studied by x-ray diffraction and nanoindenter. Finally, the corrosion behaviors of the films in 0.1 M sulfuric acid were studied using anodic polarization analyses.