Both Fe64Mn30Si6 and Fe59Mn30Si6Cr5 shape memory alloys are prepared by VIM technique. The ion nitriding of the alloys is carried out to investigate the effects of temperature and H2/N2 ratio on the related properties. Experimental results show that because of the formation of the intensive Mn4N the nitrided layer of Fe-based shape memory alloys is thinner than other Fe-based alloys. Fe59Mn30Si6Cr5 is ion-nitrided more effectively than Fe64Mn30Si6 due to the presence of Cr. The thickness and composition of the nitrided layer can be controlled by changing ion-nitriding parameters.