同步加速器台灣光子源超高真空系統設計

Design of the Ultrahigh Vacuum System for the Synchrotron Accelerator Taiwan Photon Source

熊高鈺(Gao-Yu Hsiung) ； 詹哲鎧(Che-Kai Chan) ； 張進春(Chin-Chun Chang) ； 楊佳螢(Chia-Ying Yang) ； 陳慶隆(Ching-Lung Chen) ； 陳彥斌(Yen-Bin Chen) ； 許憲能(Shen-Nung Hsu) ； 薛心白(Hsin-Pai Hsueh) ； 陳俊榮(June-Rong Chen)

《真空科技》 21卷3&4期 (2008/12) Pp. 12-19

https://doi.org/10.29808/JVSROC.200812.0002

摘要

位於我國新竹市科學園區之國家同步輻射研究中心州(SRRC)目前籌建中之能量3.0GeV「台灣光子源（Taiwan Photon Source，簡稱TPS）」第三代同步加速器為一座2nmrad低發散度且產生臨界能量為7.126keV之硬X光為主的高亮度光源設施，以彌補於1993年啟用運轉至今的1.5Gev「台灣光源」（Taiwan Light Source，簡稱TLS）適合真空紫外光(VUV)與軟X光範圍（臨界能量為2.142keV）而在較高能量硬X光之不足。此7年計畫於2007年啟動預定於2013年建造完成並試車啟用。TPS光源產生之主體加速器為「電子儲存環」，在恆定電流400mA持續注射(Top-up Injection)電子束運行必須維持加速管內氣壓低於1nTorr的超高真空度。電子軌道真空腔體探用鋁合金材料，可兼具低表面釋氣率、高熱導性、無殘留輻射、容易加工等優越性，以滿足真空腔控制尺寸精度、最佳超高真空度、運轉與維護高可靠度等需求，提供用戶連續使用固定高強度與亮度且穩定之X光束進行實驗研究。由於在國內可以完全掌握鋁合金超高真空腔之加工、清洗與銲接等製造技術，對於真空腔與元件之品質控制與系統維護等皆能自行管理，也相對提高TPS光源系統穩定運轉之可靠度；同時提升國內廠家製造技術及未來真空系統維護之自主能力。本文除了簡介台灣光子源超高真空系統設計概念外，並敘述超高真空腔之製造、抽氣幫浦之規劃、真空系統安裝與處理等步驟與考慮要點。

並列摘要

A new third generation synchrotron accelerator named ”Taiwan Photon Source (TPS)” located at the National Synchrotron Radiation Research Center (NSRRC), Hsinchu city, is a 7-years national project under construction in 2007~2013. The TPS, with energy of 3.0 GeV and emittance of 2 A new third generation synchrotron accelerator named ”Taiwan Photon Source (TPS)” located at the National Synchrotron Radiation Research Center (NSRRC), Hsinchu city, is a 7-years national project under construction in 2007 ~ 2013. The TPS, with energy of 3.0 GeV and emittance of 2 nmrad, provides a high brilliant broad band hard X-ray at the critical energy of 7.126 keV which compensates the range of higher photon energy which is insufficient for the existed 1.5 GeV Taiwan Light Source (TLS) with critical energy of 2.142 keV has operated since 1993. The electron storage ring to be operated at 400 mA of constant beam current by top-up injection needs an ultrahigh vacuum of pressure ＜ 1nTorr in the beam duct. The vacuum chambers for the beam ducts are made of aluminum alloy materials for their good properties of lower surface outgassing rate, higher thermal conductivity, no residual radiation, easily machining capabilities, etc. that fulfills the requirements of precise dimensional control, high operational beam stabilities, and high systematic reliabilities. The design concept, manufacturing processes, pumping configuration, installation and maintenance procedures, will be described in this paper.