- 期刊
Micromechanical Resonators Based on Two-dimensional Phononic Crystal Slabs
利用二維聲子晶體平板製作之微機械共振器
並列摘要
This paper reviews recently demonstrated microfabricated phononic crystals, with focus on two-dimensional phononic crystal slab structure to be operated in GHz frequency range and micromechanical resonators with high Q factor based on phononic micro-cavities, both with transducers integrated on chip for applications such as RF communications and sensing.
延伸閱讀
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