氦氣漏率標準件校正系統

A Calibration System for Helium Leak Calibrator

林郁洧(Yu-Wei Lin) ； 洪嘉俊(Chia-Chun Hung) ； 彭淑端(Shu-Tuan Peng) ； 蕭健男(Chien-Nan Hsiao) ； 陳峰志(Fong-Zhi Chen)

《真空科技》 25卷2期 (2012/06) Pp. 17-20

https://doi.org/10.29808/JVSROC.201206.0003

摘要

本研究為建立一套氦氣漏率標準件校正系統，並執行不確定度評估作業。該系統包含參考標件、待校件、真空腔體、氦氣測漏儀、人機介面及電腦控制等。依據ASTM F78校正規範進行量測。在23°C時相對擴充不確定度為7.7%，其中包含系統本身的不確定度2.0%，及隨機不確定度3.2%。研究結果表示該系統可穩定且有效率的進行氦氣漏率標準件校正作業。

關鍵字

校正 ； 氦氣漏率標準件 ； 不確定度

並列摘要

A calibration system for helium leak calibrator is developed, and the measurement uncertainty associates with the system. The design of the system take into consideration of influencing factors that include reference standard leak calibrator (ref.), leak calibrator under testing (dut.), vacuum chamber, helium leak detector, I/O interface, and computer control. The system operates referring the standard test method for calibration of helium leak detectors by use of secondary standards (ASTM F78). The present estimate of the total uncertainty in the measured leak rate of this artifact at 23ºC at the time of test is 7.7%. This includes a systematic uncertainty of 2.0% in flow meter of the NIST primary Leak standard and 3.2% random errors in the measured leak rate of this artifact. The present research has demonstrated the high stability and great efficacy of the calibration system for helium leak calibrator.

並列關鍵字

Calibration ； Helium Leak Calibrator ； Uncertainty