台灣光子源儲存環轉彎段真空腔體吊運時之氣壓量測系統

Measurement System for Vacuum Pressure of the Arc-Cell Chambers of Taiwan Photon Source during Transportation

張鮮文(Shian-Wen Chang) ； 張嘉航(Chia-Hang Chang) ； 莊俊彥(Jyun Yan Chuang) ； 李宗諭(Tsung-Yu Lee) ； 吳怜慧(Ling-Hui Wu) ； 陳志瑋(Zhi-Wei Chen) ； 張育彬(Yu-Ping Chang) ； 黃春憲(Chun-Shien Huang) ； 張進春(Chin-Chun Chang) ； 許憲能(Shen-Nung Hsu) ； 薛心白(Hsin-Pai Hsueh) ； 熊高鈺(Gao-Yu Hsiung) ； 陳俊榮(June-Rong Chen)

《真空科技》 27卷4期 (2014/12) Pp. 50-54

摘要

目前國家同步輻射研究中心能量3 GeV的台灣光子源TPS（Taiwan Photon Source）已組裝完成進入測試階段，而其14公尺的儲存環彎段真空腔體是先在竹東廠房組裝與腔體烘烤，完成後需吊運回國家同步輻射研究中心作定位安裝。本研究即針對吊運時之氣壓量測與監控為目標，我們將Oerlikon Leybold公司的氣壓量測產品與國家儀器公司通訊模組，透過硬體連接與軟體撰寫成功完成量測與監控系統，利用此系統我們將24段彎段真空腔體從竹東廠房順利運送到國家同步輻射研究中心TPS環內，且無漏氣現象發生，最後安裝完成後彎段真空腔體氣壓大約都在1.95×10^(-8) Torr。

關鍵字

同步輻射 ； 真空氣壓 ； 台灣光子源

並列摘要

Taiwan Photon Source (TPS) is an electron storage ring operating at 3 GeV, located in the National Synchrotron Radiation Research Center (NSRRC). There are 24 arc-cell vacuum chambers, 14-m-long, in the storage ring of TPS. These arc cells had been all assembled and baked in the Zhudong assembly laboratory. After the arc-cell vacuum chambers were baked completely, they were transported from the assembly laboratory to the TPS tunnel for installation. In this study, we measured the vacuum pressure in the period of transportation. The pressure measurement used Oerlikon Leybold vacuum products and communications modules from National Instruments. We developed the measurement and monitor system by integrating with the hardware and the software. By the aid of this system, the arc-cell vacuum chambers were successfully transported without leakage from Zhudong assembly laboratory to NSRRC 24 times. As arc cells were installed in the TPS tunnel, the vacuum pressures were approximately 1.95×10^(-8) Torr.

並列關鍵字

synchrotron radiation, vacuum pressure ； Taiwan Photon Source