在高溫爐內利用疊層法大量製備高品質石墨烯

High-Throughput graphene synthesis achieved by stacking method

秦浩庭(Hao-Ting Chin) ； 謝雅萍(Ya-Ping Hsieh)

《真空科技》 31卷2期 (2018/06) Pp. 13-20

摘要

石墨烯為單原子層碳材料，它被研究學者們想像可在電子元件及能量儲存等其他領域上作應用，為了實現這些預想，石墨烯必須擁有高品質以及具備可供商業上應用的尺度，化學氣相沉積一般被使用來生長高品質結晶材料，但是石墨烯用此方法生長卻有在性能及成本上的技術限制。在本文將會提出近期一些克服上述議題的研究概況，對於生長過程中細節上的認知，我們將用新穎的特性分析來呈現。材料表面效應突顯控制成核過程以及限制作用，進而達到高品質石墨烯之重要性，藉由創新方法來精準調控石墨烯製程，使之品質有顯著的提升，而這項方法在石墨烯生長中，可進一步作製程上的探討，像是晶格內缺陷結構與生長動力學。這些重要的發現區分了石墨烯生長與傳統化學氣相沉積製程間的差異，這也意味著能出乎意料之外，提出一種增加石墨烯合成尺度的機會。而這項觀點最近也被因氣體分子在低於平均自由路徑下而產生原子侷限效應的石墨烯生長論點中所證實，這個新的現象容許高品質石墨烯以堆疊式生長，此方法亦可提升數倍的產量。從分析到了解最後應用於石墨烯生長製程中，在這連貫的研究裡，我們可以實現讓石墨烯商品化，並且賦予它其他的新願景。

關鍵字

石墨烯 ； 氣相沈積法 ； 覆蓋 ； 疊層 ； 整卷生長

並列摘要

Graphene is an atomically thin layer of carbon atoms that has captured the imagination of researchers in such diverse fields as electronics and energy storage. To achieve the envisioned applications, graphene has to be produced at high quality and commercially relevant scales. Chemical vapor deposition (CVD) has been traditionally employed to produce high quality crystalline materials but graphene grown by this method has experienced limitations in achievable performance and cost. This article will give an overview of recent advances that aim at overcoming these issues. A detailed understanding of the growth process can be gained by novel characterization methods. The observed importance of surface effects emphasizes the need for controlling the nucleation process and restricts the achievable graphene quality. By employing innovative approaches, graphene's growth process can be finely controlled and its quality can be significantly enhanced. This ability permits the detailed study of fundamental processes in graphene growth, such as lattice defect formation and growth kinetics. The observed fundamental differences between graphene growth and traditional CVD processes also represents an opportunity to enhance the scale of graphene synthesis beyond expectations. It has been recently demonstrated that graphene growth proceeds even under atomic confinement below the mean free path of gas molecules. This new behavior permits the growth of high quality graphene at close packing and increases the achievable throughput of graphene production by several orders of magnitude. These improvements in characterization, understanding, and application of graphene synthesis make graphene commercially viable and transform it from a research tool to an enabling materials platform.

並列關鍵字

graphene ； CVD ； enclosure ； stacking ； roll-to-roll