利用電漿聚合膜提升光學薄膜與塑膠基板之附著性

Improvement of Adhesion between Optical Film and Plastic Substrate by Using Plasma Polymer Film

盧冠為(Kuan-Wei Lu) ； 林育田(Yu-Tian Lin) ； 魏宏森 ； 郭倩丞(Chien-Cheng Kuo)

《真空科技》 32卷2期 (2019/06) Pp. 36-42

摘要

無機材料的光學薄膜鍍在屬於有機物的塑膠基板上面，常常會遇到脫膜或是膜裂的狀況，本研究使用PMMA、330R、480R、PC等四種光學級塑膠作為基材，比較電漿蝕刻處理、電漿前處理以及電漿聚合膜作為附著層等製程對光學薄膜附著性的影響，電漿蝕刻處理可增加接觸面積，電漿前處理之後，塑膠基板表面官能基被活化產生羥基造成超親水效應，鍍製具有含氮官能基的電漿聚合膜，形成胺基或亞胺基等高表面自由能官能基，有效提升其表面自由能。經過電漿前處理以及鍍製含氮電漿聚合膜後鍍上二氧化矽薄膜，四種基板皆達到完整無脫膜的效果。

關鍵字

附著性 ； 光學薄膜 ； 塑膠基板 ； 電漿聚合膜

並列摘要

When the inorganic optical thin film deposit on the organic plastic substrate, the film has stripping or cracking. In this study, four optical grade plastics such as PMMA, 330R, 480R, and PC are used as the substrate, and compared the affect of adhesion by the plasma etching treatment, plasma pretreatment and plasma polymerization film as adhesion layer processes. Plasma etching treatment can increase the contact area; after the plasma pretreatment, the functional groups on the surface of the plastic substrate are activated to produce hydroxyl groups. The super-hydrophilic effect is applied to a plasma polymer film having a nitrogen-containing functional group to form a high surface free energy functional group such as an amine group or an imine group, thereby effectively improving the surface free energy. The plastic substrate is subjected to plasma pretreatment, deposited the nitrogen-containing plasma polymer film and then deposited the silicon dioxide film. The four substrates all achieve without stripping.

並列關鍵字

adhesion ； optical thin film ； plastic substrate ； plasma polymer film