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穿透式X光顯微術之原理與應用

The Principles and Applications of Transmission X-Ray Microscopy

摘要


X光具有高穿透力,短波長,多種成像對比機制等特性,一直以來X光顯微術即被認為是偵測物質結構的利器。然而X光顯微鏡的發展則是在同步輻射光源被廣泛應用之後才逐漸實現。國家同步輻射研究中心之穿透式X光顯微術實驗站於93年9月完成建造,操作能量8-11keV,空間鑑別力25-60奈米,具備相位對比與三維斷層掃描能力,目前已完成試車與性能測試,已於94年春天開放國內外用戶申請使用。本文將簡介穿透式X光顯微術之光學原理,報導該實驗站之性能測試,並介紹目前在該實驗站進行之部分實驗課題。

關鍵字

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並列摘要


Due to the nature of high penetration depth, short wavelength and various contrast mechanisms of X-rays, the X-ray microscopy has been long expected a powerful imaging tool. It is, however, until the invention of modern highly brilliant synchrotron light sources, the X-ray microscopy has become practical. The newly constructed advanced transmission hard X-ray microscope at National Synchrotron Radiation Research Center operational in energy 8-11 keV, provides three-dimensional images with spatial resolution 25-60 nm and with phase contrast capability for imaging light specimens. This article will introduce the optical principle of the X-ray microscopy. The performance of the NSRRC X-ray microscope will be presented in the article with examples.

並列關鍵字

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