準分子雷射拖曳式加工六角形微透鏡陣列之模擬分析

Computer Simulation for the Fabrication of Hexagonal Micro Lens Array by Using Dragging Process with Excimer Laser

王述宜(Shuh-Yi Wang) ； 黃俊欽(Chun-Chin Huang)

《科儀新知》 150期 (2006/02) Pp. 89-96

https://doi.org/10.29662/IT.200602.0011

摘要

本文針對六角形微透鏡陣列製作技術進行電腦程式模擬與分析。拖曳式加工就是以工件相對於雷射光束運動；在加工一道圓弧形微溝槽後，將工件旋轉90度，再加工另一道圓弧形微溝槽；所以拖曳式加工兩次後即可獲得直角座標排列的微透鏡陣列。本研究首創以準分子雷射拖曳式加工三次；加工一道圓弧形微溝槽後，將工件旋轉60度，重複兩次後即可獲得六角形座標排列的微透鏡陣列。以程式模擬加工後的幾何形狀，並討論微透鏡的軸對稱性，以期掌握高形狀精度的非球面微透鏡陣列之相關三次元微製造技術。

並列摘要

A computer simulation for the fabrication of aspheric hexagonal micro lens arrays by use of the laser dragging process was examined. In this new process, the first step is to generate micro channels whose cross-section shape is similar to that of the mask. Then the dragging procedure is repeated twice, each time after rotating the work piece by 60 deg relative to the previous channels. This hexagonal micro lens array may be applied in the application of image processing. Our results indicate that the hexagonal micro lens array has a better axial symmetry and higher fill factor than a rectangle one.