微型光波導及光纖元件整合於微流體晶片系統及其生醫檢測之應用

Buried Optical Waveguides/Fibers Integrated with Microfluidic Systems for Biomedical Applications

熊思愷(Suz-Kai Hsiung) ； 李國賓(Gwo-Bin Lee)

《科儀新知》 156期 (2007/02) Pp. 28-36

https://doi.org/10.29662/IT.200702.0003

摘要

本文簡介以微機電製程技術所製作之微型光波導元件及嵌入式光纖機構，並整合於微流體晶片系統中，可有效改善傳統微流體晶片應用於生醫領域檢測時仍需依賴大型光學儀器之缺點。本文提出以SU-8及SOG為材料所製成之微型光波導元件，此元件改善了一般平板型光波導以薄膜沉積方式製作而產生之製程複雜及厚度過薄等問題，且可提供高效率之光傳遞。由實驗結果可知，整合微型光學元件之微流體生醫晶片可大幅縮小系統體積並增加系統偵測靈敏度，因而可望成為生醫晶片檢測之有用工具。

並列摘要

We have demonstrated optical waveguides and buried optic fibers integrated with microfluidic chips for biomedical applications. The developed devices can be used to guide both the light source and optical signal in/out of the chip with high transmission performance. Several advantages such as lower optical loss, simplified fabrication and coupling process were observed and can be used to overcome the issues brought by the large-scale conventional counterparts. Moreover, a microfabricated flow cytometer and a capillary electrophoresis (CE) chip integrated with the developed optical waveguides and fibers have also been represented. After the minimization of the chip device, higher resolution and detection limit can be realized. Thus, the developed optical devices integrated with microfluidic chips can be a promising tool for biomedical applications.