TEM影像軟體中畫素對於量測不確定度之影響

The Effects of Image Pixels on the Uncertainty of TEM Measurement

王尉霖(Wei-Lin Wang) ； 葛裕逢(Yu-Feng Ko) ； 朱鴻源(Hong-Yuan Chu)

《科儀新知》 161期 (2007/12) Pp. 72-81

https://doi.org/10.29662/IT.200712.0008

摘要

影響穿透式電子顯微鏡量測不確定度的因素很多，例如電壓穩定度、離焦、透鏡像差、電子束的分布函數、量測的重複性及再現性等。本文主要針對在使用電荷耦合元件取得影像後，於影像處理軟體中進行量測時由影像畫素所造成的不確定度進行一系列探討。在影像處理軟體中，有三種主要量測工具，其分別為line ROI tool、line profile tool與line tool。在評估之後，其結果顯示以line profile tool進行量測，可獲得最小量測不確定度以及最低擴充不確定度百分比。之後，便比較於真實空間中與倒置晶格空間中，由軟體最終所得之影像其影像畫素對於量測時的影響，比較後發現，在降低擴充不確定度百分比時，真實空間與倒置晶格空間兩者可達到近似的結果。

並列摘要

The uncertainty of Transmission Electron Microscopy (TEM) measurement is affected by the stability of acceleration voltage, defocus, lens aberration, repeatability and reproducibility...etc. The current work evaluates that how the pixels of image obtained through charge coupling device and related software influence the uncertainty of TEM measurement. There are three major measuring tools, including line ROI tool, line profile tool, and line tool in the software for TEM measurement. The results of evaluation reveal that line profile tool provides the smallest uncertainty in measurement. By the comparison of measurements in real space and reciprocal space, both can achieve an approximate result for the reduction of uncertainty.