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廣域型真空計校正系統不確定度評估
Estimating Measurement Uncertainty in a Wide-Range Pressure Calibration System
摘要
本研究係建立廣域型真空計校正系統並分析其系統不確定度。此系統設計考量為均勻氣體分布與待測真空計之幾何位置等因素，其操作程序依據真空計直接比對法，校正範圍為10^3至10^(-6) Torr。系統評估作業依不同工作壓力範圍，利用電容真空計、旋轉轉子黏滯性真空計及熱陰極離子真空計，估算其系統不確定度。
關鍵字
無資料並列摘要
The goal of the present research is to construct a wide-range pressure calibration system, and also to analyze the degree of uncertainty associated with the system. The design of the system took into consideration of influencing factors that include uniformity of gas distribution and the geometric location of the gauge to be calibrated. The system operates following the procedure stipulated in the comparison vacuum gauge calibration method. The calibration may range from 10^-10^(-6) Torr. The system makes use of capacitor vacuum gauge, SRG and hot cathode thermion vacuum gauge to estimate the degree of uncertainty associated with the system.
並列關鍵字
無資料延伸閱讀
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