非均向薄膜之光學特性研究

The Study of Optical Properties for Anisotropic Thin Film

任貽均(Yi-Jun Jen) ； 游竟維(Ching-Wei Yu) ； 林佳鋒(Chia-Feng Lin)

《科儀新知》 167期 (2008/12) Pp. 46-54

https://doi.org/10.29662/IT.200812.0006

摘要

本文使用方位角掃描技術製鍍非均向性光學薄膜，藉由基板來回掃描降低自我遮蔽效應的非均向性，以改善在垂直沉積平面方向發生扇形擴張的現象。鋁奈米柱陣列薄膜可以利用斜向角度沉積技術製鍍；這裡以高折射率稜鏡耦合非均向金屬膜的方式，探討並分析反射率在共振發生時的光學成因。此外，設計多層薄膜結構（稜鏡／均向薄膜／非均向薄膜／空氣），並旋轉非均向層的沉積平面，以調制寬波域反射光的橢圓率。

並列摘要

The phisweep technique is applied in coating anisotropic films. During the deposition, the periodical sweep of the substrate will improve the fan-out phenomenon. Aluminum (Al) nanorod arrays (NRA) thin film are prepared by oblique angle deposition (OAD). Anisotropic optical properties of the film are measured for polarized lights which the oscillating direction of electric field is perpendicular (S-polarization) and parallel (P-polarization) to the plane of the incidence. The attenuated total reflection (ATR) curves are measured for the prism/NRA/air system. The optical resonances of ATR are interpreted by ray tracing method to find that the P polarized resonance is associated with the surface plasmon resonance. The S polarized resonance occurs because the destructive interference becomes obvious at the oblique incidence. Moreover, the polarization state of the reflected light is modulated by rotating the deposition plane of the anisotropic MgF2 layer in the prism/isotropic film/anisotropic MgF2 film/air system.