沾筆式奈米微影技術在感測器上的應用

Dip-Pen Nanolithography for Sensor Applications

呂慧歆(Hui-Hsin Lu) ； 葉嘉仁(Chia-Jen Yeh) ； 林啟萬(Chii-Wann Lin)

《科儀新知》 176期 (2010/06) Pp. 37-42

https://doi.org/10.29662/IT.201006.0005

摘要

沾筆式奈米微影技術(dip-pen nanolithography，DPN)是利用原子力顯微鏡的探針進行奈米製程。它的獨特性在於結合原子力顯微鏡在空間上高解析度與高定位的特點，以及將多種軟性物質直接寫在不同的基材上並且得到小於一百奈米以下的圖案。由於這些軟性材料的分子是透過毛細現象在基材表面形成自組裝層，因此DPN廣泛用於各式各樣的感測應用上。本文將介紹利用DPN製作的奈米感測器於生物分子與氣體感測的應用。

並列摘要

Dip-pen nanolithography (DPN) is an atomic force microscope (AFM)-based nanofabrication. The unique characteristic of DPN for obtaining the nanopatterns with feature size of sub-100 nm is to combine the high resolution and spatial registry of AFM for direct-writing of soft-materials onto various substrates. Because these molecules of soft materials are forming a self-assemble layer on substrate surface by capillary transport, DPN has been widly applied on different sensor applications. Here we introduce the nanosesnor made by DPN and apply to gas and biomolecule sensing.