環形刀具液動壓拋光法於鏡面拋光之研究

A Study on the Mirror Surface Hydrodynamic Polishing by Using the Ring Shaped Tool

王述宜(Shuh-Yi Wang) ； 謝孟修(Meng-Siou Sie)

《科儀新知》 178期 (2010/10) Pp. 91-97

https://doi.org/10.29662/IT.201010.0009

摘要

本文對新式環形刀具液動壓拋光法進行鏡面拋光可行性之研究，以期能發展刀具磨耗不影響加工率的新式拋光法，此法將可應用於精密模具與光學元件的拋光。環形刀具液動壓拋光加工因為具有刀具磨耗不影響加工加工率的特點，所以加工重現性佳。由實驗結果得知，此法可有效降低試片的表面粗度，例如可成功拋光出R(下標 a)≈4.4 nm的光滑鏡面。

並列摘要

The feasibility of mirror surface hydrodynamic polishing by using the ring shaped tool is studied. This novel polishing process is expected to apply to the precise fabrication of molds and optics. In order to reduce the tool wear effect, the semi-spherical tool is replaced by the ring shaped one. The experimental results show that the machining rate is not affected by the tool wear, that is, this new process provides excellent machining repeatability. On the other hand, the mirror surface with R(subscript a) 4.4 nm was yielded in the larger area polishing.