- 期刊
- OpenAccess
真空幫浦抽氣性能檢測技術於半導體及光電產業之應用
The Application of Vacuum Pump Performance Evaluation in Semiconductor and Electro-Optic Industries
摘要
真空幫浦為近年來半導體及光電產業在製程上之主要設備，由於潔淨環境的要求，使得真空幫浦的應用朝向乾式真空幫浦為主，以滿足半導體光電產業之需求。因沉積製程中會伴隨著污染物存在，促使真空幫浦抽氣性能撿測技術更顯得重要，以減少污染物及抽氣時間。本文從真空幫浦抽氣原理開始，介紹性能檢测技術及分析方法。
關鍵字
無資料並列摘要
Vacuum pumps have been widely used in semiconductor and electro-optic industries. Dry vacuum pumps become the main stream of the first stage of the vacuum pumping for applications in clean room demand and semiconductor electro-optic requirement. The vacuum pump performance evaluation is a critical issue for the high-tech industries. The well-performance pumps can reduce containments, shorten pump-down time, and increase the process efficiency. This paper starts from the principle of vacuum pumps and introduces the performance evaluation technologies and analysis methods.
並列關鍵字
無資料延伸閱讀
- 黃柏鈞（2016）。液環式真空幫浦選用技術研究〔碩士論文，中原大學〕。華藝線上圖書館。https://doi.org/10.6840/cycu201600094
- 林龍飛（2015）。真空濺鍍技術改善電磁屏蔽材料特性之分析與應用〔碩士論文，逢甲大學〕。華藝線上圖書館。https://doi.org/10.6341/fcu.M0217898
- 郭明宗（2010）。真空壓力對分選機中電子元件入料影響之探討〔碩士論文，崑山科技大學〕。華藝線上圖書館。https://www.airitilibrary.com/Article/Detail?DocID=U0025-2808201015352900
- Chang, H. Y. (2014). Performance Evaluation of IPM Motor for Electric Vehicle in Electromagnetic and Thermal Fluid Co-Simulation Environment [master's thesis, National Taiwan University]. Airiti Library. https://doi.org/10.6342/NTU.2014.10251
- 楊汶唐（2013）。Company Value Evaluation in Semiconductor Industry By Automatic Testing Equipment〔碩士論文，國立清華大學〕。華藝線上圖書館。https://doi.org/10.6843/NTHU.2013.00796