真空薄膜技術研究發展

Development of Vacuum Technology for Thin Film Process

蕭健男(Chien-Nan Hsiao) ； 柯志忠(Chi-Chung Kei) ； 林郁洧(Yu-Wei Lin) ； 邱柏凱(Po-Kai Chiu) ； 游智傑(Chih-Chieh Yu)

《科儀新知》 185期 (2011/12) Pp. 33-45

https://doi.org/10.29662/IT.201112.0004

摘要

本文簡述國家實驗室在真空與薄膜技術領域具多樣性及差異化之研發規劃，以妥適整合資源，與學術界互補合作，並期共同建立我國自主性真空技術平台。

並列摘要

In this article, we would like to outline the developments of diversified vacuum and thin film technologies with great differentiation in ITRC, NARL. Looking forward to being the platform of vacuum technology in Taiwan, ITRC has the obligation to appropriately integrate the process capability and instrument resources, and collaborate with academia and industry.