顯微光譜即時監控極化膜片灰階漂白技術之建立以及應用於二維極化元件製作

Fabrication of Micro Polarization Optics Device by Laser Bleaching and Study of Its Characterization by Microspectrophotometer

翁俊仁(Chun-Jen Weng) ； 范振亮(Chen-Liang Fan) ； 林宇軒(Yu-Hsuan Lin) ； 林郁欣(Yu-Hsin Lin)

《科儀新知》 215期 (2018/06) Pp. 85-101

摘要

本研究提出一種雷射灰階漂白之技術，建置具備顯微光譜即時監控之雷射灰階漂白系統，來達成製作灰階變化之二維微偏振元件。由於本研究中採用偏振膜片作為雷射漂白所需要之基材，所製作之元件將具有低成本、高明暗比之動態範圍、寬頻以及高接受角之特性。本研究前半部分著重於單點偏振薄片漂白技術建立及完成偏振顯微光譜影像量測方法，找出雷射漂白最適合波長，以及探討雷射功率與漂白後偏振薄片明暗比之相對關係。後半部分則將著重於二維陣列偏振薄片漂白技術建立、即時監控技術，以自動化程式控制二軸移動平台進行線性偏振薄片二維佈點雷射漂白，並搭配顯微光譜即時監控之即時監控其偏振特性，製作具明暗比調控之二維微偏振元件，未來可應用於高動態對比之灰階光罩製作(256階以上)、高儲存容量之記憶體以及製作高解析度、高明暗比之線性偏光光柵。

並列摘要

A grey scale laser bleaching method has been proposed in this study. A polarimetric microspectrophotometer (MSP) was built in this project in the first. Then, the two dimensional micro polarization optics devices with controllable extinction ratio was made from the polarizer film through laser bleaching via monitoring by this MSP. The devices made from conventional polarizer films have the special characteristics such as low cost, broadband, high dynamic range of extinction ratio and high acceptance angle. This work about setup of the MSP and single point laser bleaching scheme was done in the first. Optimized laser bleaching wavelength and the relationship between extinction ratio of bleached polarizer film and laser power was studied by the spectrometer. The polarimetric image distribution of bleached polarizer film was measured by the image camera. Next, two dimensional micro polarization optics devices based on linear polarizer film was fabricated with 2-axis linear stages controlled by LabVIEW program. A polarimetric MSP was used as real-time polarimetric analysis in order to control the extinction ratio and other polarimetric characters. These devices have the potential in the high grey scale mask, high density optical data storage, linear polarizer based grating and circular polarizer based grating.