奈米粒子修飾氧化鋅奈米線於大氣環境中氮氧化物氣體感測應用

Application of Nanoparticle Modified Zinc Oxide Nanowires for Nitrogen Oxides Gas Sensing under Ambient Environment

呂文忠(Wen-Chung Lu) ； 陳煜杰(Yu-Chieh Chen) ； 柯賢文(Hsien-Wen Ke) ； 林鶴南(Heh-Nan Lin)

《科儀新知》 218期 (2019/03) Pp. 26-33

摘要

我們製作奈米粒子修飾之氧化鋅奈米線電阻式感測晶片，並應用於大氣環境中氮氧化物氣體感測。感測晶片上有電極及奈米材料，當氮氧化物氣體分子吸附到奈米材料表面，使得晶片電阻增加，因此可由電阻變化率得知氣體濃度。以紫外光活化感測模式，測出對0.5 ppm一氧化氮及二氧化氮，響應值約為110%及590%，具有高靈敏度。我們也組裝一台可由手機進行操控的可攜式氣體感測器，以應用軟體程式記錄感測晶片電阻變化，便可得知周圍環境氮氧化物氣體濃度。

並列摘要

We report on the fabrication of nanoparticle modified zinc oxide nanowire resistive sensing chips for nitrogen oxides gas sensing under ambient environment. A sensing chip is made of two electrodes with grown nanomaterial. The chip resistance increases when NO_x gas molecules adsorb on the nanomaterial surface. The gas concentration can thus be deduced from the resistance change. Using the UV-activation mode, responses of around 110% and 590% at 0.5 ppm NO and NO_2, respectively, have been obtained under ambient environment. A cell phone operated portable gas sensor has also been constructed. The resistance change of the sensing chip due to NO_x gas is recorded in an App program and the gas concentration in the surrounding environment can be obtained.