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金氧半場效應電晶體載子移動率之萃取與分析

A Study of Effective Carrier Mobility Extraction in MOSFETs

摘要


本論文結合了兩個理論式:一個是精確的反轉層電荷密度;另一個是具物理意義兼具半經驗式的載子有效移動率式子,利用此二式並採用非線性最小平方最佳化技術,來吻合MOSFET汲極電流對閘極電壓特性曲線之實驗資料點,用以萃取出載子移動率。我們使用兩組尺寸不同的n-MOS元件來萃取載子移動率。其中一組固定通道寬度改變通道長度,另一組則相反;接著探討尺寸不同對於載子移動率的影響及其原因。

並列摘要


In our study, we will extract the effect carrier mobility from the measured I-V data of MOSFET devices by applying the least square curve fitting optimization which combining a new theoretical model of inversion layer charge and a physically-based semi-empirical model on carrier mobility. Meanwhile, we will also discuss the dimension effects about the mobilities and the interface characteristic parameters.

並列關鍵字

MOSFET MOBILITY

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